1,720,971 research outputs found
Can we improve the energy efficiency of EUV lithography?
Get PDFThis paper discusses a simple, low-cost, highly efficient two-mirror
projector with a simplified illumination system. The EUV source power can be
reduced by 1/10 compared to the current six-mirror EUV projector system. The
required EUV power is 20 watts for process speed of 100 wafers per hour. The
proposed in-line projector achieves 0.2 NA (20 mm field) and 0.3 NA (10 mm
field), which can be assembled in a cylindrical tube configuration similar to a
DUV projector, providing superior mechanical stability and easier
assembly/maintenance. The EUV light is introduced in front of the mask through
two narrow cylindrical mirrors located on both side of the diffraction cone,
providing average normal illumination and reducing the mask 3D effect. The
simplified illumination system provides symmetric quadrupole off-axis
illumination, bypassing central obscuration and improving spatial resolution,
also realizing K\"ohler illumination. The theoretical resolution limit is 24 nm
(20 mm field), image reduction factor x5 and object image distance (OID) 2000
mm. With the curved surface mask, the tool height can be reduced to (OID) 1500
mm, which provides resolution 16 nm (10 mm field). It will be suitable for
small die size chip production for mobile applications as well as the latest
chiplet technology.Comment: 16 pages, 15 figures, Photomask Japan symposium, Yokohama 202
Generalized entropically damped artificial compressibility for weakly compressible SPH
Get PDFThis paper presents a formulation of a general form of an equation for pressure using thermodynamic principles. The motivation for this is in large part due to the need for a pressure equation for smoothed particle hydrodynamics, SPH, that takes into account the role of entropy. This is necessary because the use of physical and artificial viscosity leads to an increase in entropy. While such an increase in entropy in liquids may be negligibly small, standard SPH formulations treat a liquid as a weakly compressible gas. Consequently, for fluid–fluid and fluid–structure impact flows, the resulting increase in entropy is not negligible anymore. The proposed pressure equation contains diffusion terms whose main role is to smooth out unphysically large numerical oscillations in the pressure field related to the shock during an impact event. One consequence of adopting this numerical scheme, however, is that there are new (free) parameters that must be set. Nevertheless, effort has been made to obtain their plausible estimators from physical principles. The proposed model is also applicable outside the domain of SPH
Going Beyond Counting First Authors in Author Co-citation Analysis
Get PDFThe present study examines one of the fundamental aspects of author co-citation analysis (ACA) - the way co-citation
counts are defined. Co-citation counting provides the data on which all subsequent statistical analyses and mappings
are based, and we compare ACA results based on two different types of co-citation counting - the traditional type that
only counts the first one among a cited work's authors on the one hand and a non-traditional type that takes into
account the first 5 authors of a cited work on the other hand. Results indicate that the picture produced through this non-traditional author co-citation counting contains more coherent author groups and is therefore considerably clearer. However, this picture represents fewer specialties in the research field being studied than that produced through the traditional first-author co-citation counting when the same number of top-ranked authors is selected and analyzed. Reasons for these effects are discussed
Variations on the Author
Get PDF“Variations on the Author” discusses two of Eduardo Coutinho’s recent films (Um Dia na Vida, from 2010, and Últimas Conversas, posthumously released in 2015) and their contribution to the general question of documentary authorship. The director’s filmography is characterized by a consistent yet self-effacing form of authorial self-inscription: Coutinho often features as an interviewer that rather than express opinions propels discourses; an interviewer that is good at listening. This mode of self-inscription characterizes him as an author who is not expressive but who is nonetheless markedly present on the screen. In Um Dia na Vida, however, Coutinho is completely absent form the image, while Últimas Conversas, on the contrary, includes a confessional prologue that moves the director from the margins to the center of his films. This article examines the ways in which these works stand out in the filmography of a director who offers new insights into the notion of cinematic authorship
Appropriate Similarity Measures for Author Cocitation Analysis
Get PDFWe provide a number of new insights into the methodological discussion about author cocitation analysis. We first argue that the use of the Pearson correlation for measuring the similarity between authors’ cocitation profiles is not very satisfactory. We then discuss what kind of similarity measures may be used as an alternative to the Pearson correlation. We consider three similarity measures in particular. One is the well-known cosine. The other two similarity measures have not been used before in the bibliometric literature. Finally, we show by means of an example that our findings have a high practical relevance.information science;Pearson correlation;cosine;similarity measure;author cocitation analysis
Dispelling the Myths Behind First-author Citation Counts
Get PDFWe conducted a full-scale evaluative citation analysis study of scholars in the XML research field to explore just how different from each other author rankings resulting from different citation counting methods actually are, and to demonstrate the capability of emerging data and tools on the Web in supporting more realistic citation counting methods. Our results contest some common arguments for the continued
use of first-author citation counts in the evaluation of scholars, such as high correlations between author rankings by first-author citation counts and other citation
counting methods, and high costs of using more realistic citation counting methods that are not well-supported by the ISI databases. It is argued that increasingly available digital full text research papers make it possible for citation analysis studies to go beyond what the ISI databases have directly supported and to employ more
sophisticated methods
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