8,704 research outputs found
Deep anisotropic dry etching of silicon microstructures by high-density plasmas
No full textThis thesis deals with the dry etching of deep anisotropic microstructures in monocrystalline silicon by high-density plasmas. High aspect ratio trenches are necessary in the fabrication of sensitive inertial devices such as accellerometers and gyroscopes. The etching of silicon in fluorine-based plasmas is isotropic. To obtain anisotropy the addition of sidewall passivation is necessary. This is achieved with both oxygen passivation at low temperatures and fluorocarbon passivation at room temperature. A quantitative approach was pursued to explain the etching mechanism. The etch results were analysed using the measured plasma species fluxes and the surface composition. Moreover, the transport of the plasma species in narrow anisotropic structures is a fundamental factor determining the etch rate and the profile evolution. The experimental methods such as the etching equipment, plasma diagnostics, surface analysis and sample preparation are described in chapter 2. Three etching processes were investigated: the cryogenic etching process with oxygen passivation at low temperatures, the Bosch process with fluorocarbon passivation at room temperature and the novel triple pulse process that was developed in our laboratory. The polymer deposition mechanism and the characteristic role of the ions are also explained. The cryogenic etching process is discussed in chapter 3. Fluorine radicals, oxygen radicals and ion bombardment are responsible for the three main sub-processes, that is, etching, sidewall passivation and depassivation of the trench bottom, respectively. Etching experiments with an extremely low ion-to-radical flux ratio were used to reveal the etching mechanism. Crystal orientation dependent etching leading to Si(111) crystal facets is observed in a surface kinetics controlled regime. By varying the plasma conditions it is possible to adjust the etching mechanism from fluorine-limited to ion-limited. Controlled etching is obtained because the etching is tuned from aspect ratio dependent in the fluorine-limited domain to aspect ratio independent in the ion-limited domain. The transport of radicals in high aspect ratio trenches is an important limiting factor and was investigated with special structures. The etch results are described by an analytic model that is based on the surface site balance of fluorine and oxygen radicals. The results are further explained with a Monte Carlo simulation model. The Bosch process is clarified in chapter 4. The anisotropy of the etched structures is controlled by balancing the etching and passivation pulse. However, the maximal obtainable aspect ratio is limited by convergence of the trench sidewalls due to excessive passivation. The maximal obtainable aspect ratio increases if the ion-to-radical flux ratio increases. The transport of ions is an important limiting factor in the depassivation of the bottom of the trench. Divergence of the ion beam leads to a reduction of the ion flux, so that the fluorocarbon passivation is insufficiently removed near the base of the sidewalls. The average ion angle was measured and correlated to the maximal obtainable aspect ratio. The Bosch process was improved at the depassivation side with the triple pulse process and at the passivation side with preferential sidewall deposition. The triple pulse process that is described in chapter 5 has the aim to improve the depassivation in deep trenches. The three main sub-processes are decoupled using a separate depassivation pulse directly after the etching and passivation pulses. The fluorocarbon passivation is efficiently removed with low-pressure, high-density, oxygen-based plasmas. The investigated plasma chemistries include O2, CO2 and SO2. The triple pulse process leads to better profile control with a straight trench bottom. However, the maximal obtainable aspect ratio is comparable to the Bosch process because a larger etch depth and a small lateral etch cancel out. The polymer deposition mechanism is treated in chapter 6 with the aim to understand the fluorocarbon passivation in deep trenches. The deposition on plane surfaces and on special structures was investigated to distinguish between the radical-induced and ion-enhanced components. A simple analytical model, which explains the main deposition characteristics, was developed. Preferential sidewall deposition is obtained for higher ion fluxes and higher bias voltages where sputtering plays an important role. In this case no fluorocarbon passivation has to be removed from the bottom of the trench. The trench profile was optimised in the Bosch process by tuning the bias voltage during etching and passivation independently. It resulted in perfectly anisotropic trenches but the maximal obtainable aspect ratio was still limited by a small lateral etch. The characteristic role of the ions in the etching mechanism is explained in chapter 7. Ion-induced etching of both SiC in a SF6-O2 plasma and Si in a Cl2 plasma were investigated. The impact of the ions on the profile evolution can be examined more explicitly because spontaneous chemical reactions are absent for these plasma-material systems. The etching mechanism varies from fluorine-limited to ion-limited depending on the radical-to-ion flux ratio. Microtrenches are observed for an ion-limited etching mechanism. Fluorine-limited SiC etching is aspect ratio dependent in contrast to ion-limited SiC etching, which is aspect ratio independent. The etching of high aspect ratio SiC structures is limited by the positive sidewall taper. This is presumably caused by insufficient removal of the thin fluorocarbon layer on the surface. Si etching in a Cl2 plasma is always aspect ratio independent in contrast to SiC etching because of the low reaction probability. The conclusions and recommendations of this thesis are given in chapter 8.Applied Science
Smart card usage for information retrieval / M.A Ismail and M. H. Selamat
No full textThe emergence of Electronic Commerce have enhanced the business efficiency, increased responsiveness and accountability and reduced the cost of transaction as it become more common nowadays. Recent developments in encryption, microchips, and computer network technology have enabled consumers to make electronic payments through the usage of a stored-value card or so-called electronic wallet, which money value is stored digitally. The transactions made with stored-value cards resemble transactions made with currency or coin. An information retrieval from digital library can make use of the extraordinary features of smart card to create an efficient, low cost and safe transaction throughout the virtual world. The usage of smart card could settle the hassle of using credit card and the need of central authorization to purchase information of any kind
Muatan Fakta Sejarah dalam Film Karya Usmar Ismail 1950-1954
No full textABSTRAK Zulfa, Nila . 2018. Muatan Fakta Sejarah dalam Film Karya Usmar Ismail (1950-1954). Skripsi, Jurusan Sejarah, Fakultas Ilmu Sosial, Universitas Negeri Malang. Pembimbing: Drs. Ismail Lutfi, M.A. Kata Kunci: fakta sejarah, film, Usmar Ismail Penelitian ini dilatarbelakangi oleh permasalahan tentang muatan fakta dalam film bertema epik historis. Film yang digunakan sebagai media penyalur informasi dan komunisasi massal yang bergenre sejarah akan memunculkan sebuah permasalahan tentang relevansi muatan fakta sejarah yang terdapat dalam film. Permasalahan yang diteliti adalah: (1) latar peristiwa dalam film Usmar Ismail (1950-1954), (2) latar kehidupan Usmar Ismail, (3) muatan fakta sejarah dalam tiga film karya Usmar Ismail (1950-1954) yakni film Darah dan Doa, Enam Djam di Djokja, dan film Lewat Djam Malam.Tujuan penelitian ini (1) memaparkan latar peristiwa yang diangkat dalam film Darah dan Doa, Enam Djam di Djokja, dan film Lewat Djam Malam, (2) merekontruksi latar kehidupan Usmar Ismail (3) mendapatkan kesimpulan tentang muatan fakta sejarah dalam tiga film karya Usmar Ismail yakni film Darah dan Doa, Enam Djam di Djokja, dan film Lewat Djam Malam. Jenis penelitian ini menggunakan metode sejarah Kuntowijoyo. Teori yang digunakan dalam penelitian ini adalah teori neorealisme dan teori mimetik. Pengumpulan data dilakukan dengan cara observasi dan library research. Sumber data primer dalam penelitian ini berupa film serta data tekstual berupa resensi film dan surat kabar. Sedangkan data sekunder menggunakan buku-buku serta penelitian terdahulu yang terkait dengan latar peristiwa yang menjadi sumber inspirasi dalam pembuatan film Darah dan Doa, Enam Djam di Djokja, serta film Lewat Djam Malam. Berdasar hasil analisis data tersebut, diperoleh kesimpulan yakni pertama, latar peristiwa dalam film yang menjadi ini merupakan sebuah fakta sejarah berdasarkan data dalam dokumen. Kedua, Usmar Ismail merupakan multitalent person dan tokoh revolusioner dengan membawa karakter film nasionalis pertama dalam dunia perfilman Indonesia. Ketiga, muatan fakta sejarah dalam film Darah dan Doa, Enam Djam di Djokja, serta film Lewat Djam Malam yang berdasar pada dokumen dan arsip. ABSTRAK Zulfa, NilaIliyyatuz. 2018. Historical Facts onUsmar Ismail Movies (1950-1954). Thesis, Department of History, Faculty of Social Sciences, State University of Malang. Advisor: Drs. Ismail Lutfi, M.A. Keyword:historical facts, movie, Usmar Ismail This research is supposed by the problem of facts in the movie which is categorized as epic-historic. In this case, movie as a tool of sending public information and communication will trigger a problem about relevancy of historical facts in the movie and archives. Research problems are (1) the ideas onUsmar Ismail movies (2)background and thought of Usmar Ismail, (2) the value of history facts inside of three movies of Usmar Ismail (1950-1954) such as DarahdanDoa, EnamDjam di Djokja, and LewatDjamMalam movie. This research aimed to (1) construct the fact of UsmarIsmial movies (DarahdanDoa, EnamDjam di Djokja, and LewatDjamMalam) (2) construct background and thought ofUsmar Ismail, (2) conclude of historical facts on three of Usmar Ismail movies such as DarahdanDoa, EnamDjam di Djokja, and LewatDjamMalam movie. This research which used approach of Kuntowijoyo history method. Theoretical frameworks used in this research are neorealism and mimetic theory. To collect the data, the researcher used observation and literary study. The primary data of this research is a film and text like newspaper and map archive. Meanwhile, the secondary data are many books of ground force and previous studies which is related to an event as main inspiration of making DarahdanDoa, EnamDjam di Djokja, and LewatDjamMalam movie. Based on data analysis above, the researcher concluded that background of the movie that it into this is a historical fact based on the data in a document,Usmar Ismail is a multi-talent person and revolutionary figure in film industry, who shows character of nationalistic film in industry film of Indonesia. Second, the value of facts in movies by Usmar Ismail such as DarahdanDoa, EnamDjam di Djokja,and LewatDjamMalam is same with history archives which is supported and directed by both witness and actor of the event inside the movie
Etika Guru Menurut Hafidz Hasan Al-Mas'udi Dalam Kitab Taisir Al-Khallaaq Fii ‘Ilmi Al-Akhlaq Dan Relevansinya Dengan Kode Etik Guru Di Indonesia
No full textNasution, Bayu Ismail. 2023: Teacher Ethics According to Hafidz Hasan al-Mas'udi in Kitab Taisir al-Khallaq Fii 'Ilmi al-Akhlaq and Its Relevance to
the Code of Teacher Ethics in Indonesia. Thesis Department of Islamic
Education, Faculty of Tarbiyah and Teacher Training State Islamic
University (UIN) North Sumatra. Supervisor I Dr. Sahkholid, S.Ag., M.A.,
Supervisor II Dr. Sholihah Titin Sumanti, M.Ag
Dinamika Kerukunan Antarumat Beragama : Konflik, Rekonsiliasi, dan Harmoni
No full textBuku karya Prof. Dr. H. Faisal Ismail, M.A. yang mengulas, mengupas, dan mem- bentangkan tentang Dinamika Kerukunan Antarumat Beragama ini merupakan akumulasi dari hasil pembacaan, pengamatan, pandangan, pengalaman, tinjauan, dan pemikiran kritisnya sebagai pejabat tinggi, Guru Besar, dan Duta Besar.Buku ini sangat unik dan mempunyai bobot tersendiri karena ditulis oleh seorang akademisi dan praktisi. Buku ini sangat pas dibaca oleh para mahasiswa, akademisi, peneliti, tokoh agama, birokrat, dan pejabat pemerintah pengambil kebijakan di bidang hubungan antarumat beragama demi terpeliharanya saling pengertian, dialog, toleransi, harmoni, dan kerukunan antarumat beragama yang solid, mantap, dan dinamis
MUATAN FAKTA SEJARAH DALAM FILM KARYA USMAR ISMAIL (1950-1954)
No full textABSTRAK Zulfa, Nila Iliyyatuz. 2017. Muatan Fakta Sejarah Dalam Film Karya Usmar Ismail (1950-1954). Skripsi, Jurusan Sejarah, Fakultas Ilmu Sosial, Universitas Negeri Malang. Pembimbing: Drs. Ismail Lutfi, M.A. Kata Kunci: Fakta Sejarah, Film, Usmar Ismail Penelitian ini dilatar belakangi oleh permasalahan tentang muatan fakta dalam film bertema epic historis. Film yang digunakan sebagai media penyalur informasi dan komunisasi massal yang bergenre sejarah akan memunculkan sebuah permasalahan tentang relevansi muatan fakta sejarah dalam film dengan data dokumen. Selain itu sutradara sebagai penentu karakter dan arah gerak sebuah film juga dibahas dalam penelitian ini. Usmar Ismail sebagai sutradara pertama yang menampilkan film yang Indonesia sentries sekaligus menjadi sutradara dalam objek penelitian juga dibahas dalam penelitian ini. Permasalahan yang diteliti adalah (1) Latar Belakang dan Pemikiran Usmar Ismail, (2) Muatan fakta sejarah dalam tiga film karya Usmar Ismail (1950-1954) yakni film Darah Dan Doa, Enam Djam Di Djokja dan film Lewat Djam Malam. Tujuan penelitian ini (1) merekontruksi latar belakang dan pemikiran Usmar Ismail (2) mendapatkan kesimpulan tentang muatan fakta sejarah dalam tiga film karya Usmar Ismail yakni film Darah Dan Doa, Enam Djam Di Djokja dan film Lewat Djam Malam. Jenis penelitian ini adalah deskriptif, dengan menggunakan pendekatan metode sejarah Kuntowijoyo. Kerang kateori yang digunakan dalam penelitian ini adalah teori neorealisme dan teori mimetik. Pengumpulan data dilakukan dengan cara observasi dan study pustaka. Sumber data primer dalam penelitian ini berupa film dan data tekstual berupa resensi film, surat kabar dan arsip peta, sedangkan data sekunder menggunakan buku-buku serta penelitian terdahulu yang terkait dengan latar peristiwa yang menjadi sumber inspirasi dalam pembuatan film Darah Dan Doa, Enam Djam Di Djokja dan film Lewat Djam Malam. Berdasar hasil analisis data tersebut, diperoleh kesimpulan antara lain, pertama, Usmar Ismail merupakan tokoh revolusioner dengan membawa karakter film nasionalis pertama dalam dunia perfilman Indonesia. Kedua, muatan fakta sejarah dalam film Darah Dan Doa, Enam Djam Di Djokja dan film Lewat Djam Malam yang berdasar pada dokumen dan arsip. Saran dari penulis adalah harapan terkait bertambahnya penelitian terhadap muatan fakta dalam film. Hal ini akan menambah objek kajian sejarah lebih variatif. Selain itu juga untuk menambah bahan ajar guru sejarah tentang peristiwa yang menjadi latar dari ketiga film ini. ABSTRAK Zulfa, NilaIliyyatuz. 2017. Historical Facts On Three Of Usmar Ismail Movies (1950-1954). Thesis, Departement of History, Fakulty of Social Science, State University of Malang. Adviser: Drs. Ismail Lutfi, M.A. Keyword: Historical Facts, Movie, Usmar Ismail This research is supposed by the problem of facts in the movie which is categorized as epic-historic. In this case, movie as a tool of delivering public information and communication will trigger a problem about relevancy of historical facts in the movie and archives. Research problems are (1) background and thought of Usmar Ismail, (2) the value of history facts inside of three movies of Usmar Ismail (1950-1954) such as Darah Dan Doa, Enam Djam Di Djokja and Lewat Djam Malam movie. This research aimed to (1) construct background and thought ofUsmar Ismail, (2) conclude of historical facts on three of Usmar Ismail movies such as Darah Dan Doa, Enam Djam Di Djokja and Lewat Djam Malam movie. This research is a descriptive research which used approach of Kuntowijoyo history method. Theoretical frameworks used in this research are neorealism and mimetic theory. To collect the data, the researcher used observation and literary study. The primary data of this research is a film and text like newspaper and map archive. Meanwhile, the secondary data are many books of ground force and previous studies which is related to an event as main inspiration of making Darah Dan Doa, Enam Djam Di Djokja and Lewat Djam Malam movie. Based on data analysis above, the researcher concluded that Usmar Ismail is a revolutionary figure in film industry, who shows character of nationalistic film in industry film of Indonesia. Second, the value of facts in three movies by Usmar Ismail such as Darah Dan Doa, Enam Djam Di Djokja and Lewat Djam Malam movie is same with history archives which is supported and directed by both witness and actor of the event inside the movie. Darah Dan Doa represented long march of Siliwangi division that is caused by violation of Renville agreement. Well, Enam Djam Di Djokja as epic-historic represented public attack event at 1st March 1949, which is based on direction of history witness and actor. Meanwhile, Lewat Djam Malam told the patriots condition in post-war of retaking independence. Last, the writer expects the readers to develop research about the value of film deeper. In this case, it will contribute to various objects of history studies. Besides, it helps teacher to give additional materials about history which is conveyed by the three movies above
Structural characterization of proteins in wheat flour doughs enriched with intermediate wheatgrass (Thinopyrum intermedium) flour
No full textThe high protein and fiber content of intermediate wheatgrass (IWG) - together with its interesting agronomic traits and environment-related benefits - make this perennial crop attractive also for human consumption. Structural characteristics of the proteins in IWG/hard wheat flour (HWF) doughs (at IWG:HWF ratios of 0:100, 50:50, 75:25 and 100:0) - including aggregate formation, thiols availability, and secondary structure changes during dough mixing - were investigated. Proteins in IWG-doughs had higher solubility and thiol content - as function of IWG content - suggesting that protein network was mostly based on non-covalent interactions. While 50% IWG-enrichment gave an increase in random structures, enrichment at ⩾75% resulted in a decrease in β-sheets with an increase in random structures, indicating a decrease in structural order. The observed differences in protein molecular configuration and interactions in HWF compared to IWG doughs necessitate further investigation to establish their impact on the quality of IWG-enriched bread
Welcoming schools : a Lebanese model - by Rana Ahmad Ismail.
No full textThesis (M.A.)--American University of Beirut, Department of Education, 2002.;"Advisor: Dr. Miles Lovelace, Professor, Education--Member of Committee: Dr. Murad Jurdak, Professor, Education--Member of Committee: Mary Abu-Saba, Assistant Professor, EducatioBibliography : leaves 238-244.The purpose of this case study report was to provide an example, for interested professionals, of the application of inclusive education in a Lebanese private school through the detailed description of the process of establishing the special education pr
The eighteenth century cult of landscape gardening, with special reference to Alexander poper - by Adel Said Ismail
No full textThesis (M.A.)--Dept. of English, A.U.B
Landscape and ruins: conservation and enhacement of Heritage of byzantine period in Turkey
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