InterNano Nanomanufacturing Repository
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Multiple 360 Degree domain wall switching in thin ferromagnetic nanorings in a circular magnetic field
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Simulations of novel nanostructures formed by capillary effects in lithography
No full textHigh aspect ratio three-dimensional nanostructures are of tremendous interest to a wide range of fields such as photonics, plasmonics, fluid mechanics, and biology. Recent developments in capillary force lithography (CFL) have focused on taking advantage of the formation of menisci to enhance the functionality of small size-scale structures. In this study, simulations of the three-dimensional shapes of equilibrium menisci formed in capillaries with various cross-section geometries are studied. The capillary cross sections include regular polygons and equilateral star-shapes with sharp and rounded corners. The characteristic dimension of the physical lithography systems which are simulated is on the order of 100 nm. At such size-scale, surface-tension-effects are predominant, and as a consequence, our simulations demonstrate that nanometer-sized structures with great application potentials can be fabricated. Specifically, this study demonstrates that surfaces with three-dimensional nanoscale structures can be fabricated from templates with micron or sub-micron features through the development of cusps in the corners of the polygonal capillaries. Quantitatively, the effects of contact angle, corner angle, meniscus confinement, and corner rounding radius are examined and scaling analyses are presented to describe the dependencies of the height variation across the meniscus on these parameters. These simulations serve as useful guides for extending the development and implementation of capillary force lithography. (C) 2010 Elsevier Inc. All rights reserved
Supercritical fluid deposition of compositionally uniform yttria stabilized zirconia films
No full textWe report the formation of yttria stabilized zirconia (YSZ) thin films by supercritical fluid deposition (SFD) in carbon dioxide at 20 MPa and a stage temperature of 300 Â°C via hydrolysis of zirconium(IV) hexafluoroacetylacetonate and yttrium(III) hexafluoroacetylacetonate. Post-deposition annealing of the films at 800 Â°C yields crystalline films having the expected fluorite structure as evidenced by X-ray diffraction. Such films are suitable for the fabrication of electrolyte thin films for micro-solid oxide fuel cells (μ-SOFC). We show that a cyclic co-deposition process in which aliquots of precursor are introduced sequentially enables the depostion of YSZ thin films with uniform composition as evidenced by X-ray photoelectron spectroscopy. In each cycle, the mixed precursor solution in CO2 is introduced to the reactor and then purged following a short reaction interval. By contrast, simple batch SFD processes that employ hydrolysis of the mixed precursors introduced at the onset of the depositions lead to non-uniform distributions of the cations throughout the thickness of the films. The cyclic deposition approach extends supercritical fluid deposition to materials such as multi-cations oxides for which precise control of stoichiometry is required
N3ASIC Based Nanowire Volatile RAM
No full textAs CMOS technology advances into the nanoscale, the continuous push for low power, high performance, and dense volatile memory is reaching its limit. Moreover, in the nanometer regime complex design rules and manufacturing costs are escalating as it is getting increasingly difficult to control manufacturing process parameters. In this paper, we propose a novel 10 transistor based volatile Nanowire Random Access Memory (10T-NWRAM) which is highly scalable and manufacturing friendly since it is based on the very regular N3ASIC fabric. Besides, it has the potential to be significantly faster and low leakage alternative to SRAM since high performance nanowire FETs and dynamic logic is used for memory architecture
