imec Publications (Interuniversity Microelectronics Centre)

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45628 research outputs found

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Relationship between film thickness loss and polymer deprotection for extreme ultraviolet and ArF photoresists

Author: Winroth Gustaf
Younkin Todd
Blackwell James M.
Gronheid Roel
Publication venue
Publication date: 31/12/9999
Field of study

Optimization of vertical carbon nanotube interconnects using the direct electrical comparison of integration steps

Author: van der Veen Marleen
Barbarin Yohan
Boemmels Juergen
Tokei Zsolt
Publication venue
Publication date: 31/12/9999
Field of study

Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues

Author: Krishtab Mikhail
de Marneffe Jean-Francois
De Gendt Stefan
Baklanov Mikhaïl
Publication venue
Publication date: 31/12/9999
Field of study

Periodic LoRa signal fluctuations in Urban and Suburban environments

Author: Ameloot Thomas
Van Torre Patrick
Rogier Hendrik
Publication venue
Publication date: 31/12/9999
Field of study

Defect avoidance for extreme-ultraviolet mask defects using intentional pattern deformation

Author: Chae Yoo-jin
Jonckheere Rik
Gupta Puneet
Publication venue
Publication date: 31/12/9999
Field of study

Reticle quality needs for advanced 193 nm lithography

Author: Jonckheere Rik
Vandenberghe Geert
Wiaux Vincent
Verhaegen Staf
Ronse Kurt
Publication venue
Publication date: 31/12/9999
Field of study

Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm

Author: Volders Henny
Richard Olivier
Carbonell Laure
Palmans Roger
Verdonck Patrick
Heylen Nancy
Kellens Kristof
Armini Silvia
Bender Hugo
Zhao Larry
Tokei Zsolt
Publication venue
Publication date: 31/12/9999
Field of study

Ultra-fast in-line metrology for 3D SIC TSV line - Bonding & thinning

Author: Guittet Pierre-Yves
Markwort Lars
Savage Greg
Halder Sandip
Jourdain Anne
Publication venue
Publication date: 31/12/9999
Field of study

Controlled patterning of biomolecules on solid surfaces

Author: Martelé Y.
Callewaert K.
Naessens K.
Van Daele Peter
Baets Roel
Schacht E.
Publication venue
Publication date: 31/12/9999
Field of study

All-optical wavelength conversion at 160Gb/s using an SOA and a 3rd order SOI nanowire periodic filter

Author: Stamatiades C.
Vyrsokions K.
Stampoulidis L.
Maziotis A.
Sheng Z.
Van Thourhout Dries
Bolten J.
Karl M.
Wahlbrink T.
Avramopoulos H.
Publication venue
Publication date: 31/12/9999
Field of study

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imec Publications (Interuniversity Microelectronics Centre)

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