25,606 research outputs found
Moon Chung-hee Il mare che cuce
Selezione antologica in lingua italiana di poesie di Moon Chung-hee scritte tra il 1973 e il 2012.Anthological selection of poems by Moon Chung-hee, written between 1973 and 2012
sj-pdf-1-jso-10.1177_23971983231222368 – Supplemental material for Approval status of essential therapeutic drugs for systemic sclerosis versus that of drugs for rheumatoid arthritis
Supplemental material, sj-pdf-1-jso-10.1177_23971983231222368 for Approval status of essential therapeutic drugs for systemic sclerosis versus that of drugs for rheumatoid arthritis by Ki Won Moon, Soo-Hee Hwang, Jieun Yun and Eun Bong Lee in Journal of Scleroderma and Related Disorders</p
BEIR V 방법을 이용한 한국인의 방사선에 의한 암사망 예측
The lifetime fatal radiation-induced cancer for Korean has been estimated for both single and continuous radiation exposure using the BEIR V method. In case of single exposure, the major radiation-induced cancer type for young and old age is digestive and respiratory cancer, respectively. For the whole population of Korean, the major radiation-induced cancer type is digestive cancer. In case of 1mGy/yr continuous exposure from birth to death, the contribution of total radiation-induced cancer mortality to natural cancer mortality is about 3%
Modeling of in-vessel gap cooling and its validation against LAVA, ALPHA, and LMP200 experiments
The gap cooling phenomenon is a key issue to explain why the 19 tons of melt retained in the RPV lower head in the TMI accident did not significantly damage the vessel. This study developed the model for gap cooling phenomenon and was validated against the several gap cooling experiments with 30 kg, 50 kg, 70 kg of Al2O3 melt (LAVA and ALPHA experiments), and 220 kg and 360 kg of Al2O3 + Fe melt (LMP200 experiments). To estimate the thermal behavior of the vessel during the gap cooling, we modeled heat transfer from the melt and crust to the vessel and heat removal by water penetrating the gap. The gap size which determines the flow rate of water penetrating the gap was evaluated considering thermal interaction between the melt and water; Inverse-Leidenfrost effect, thermal fracture of the crust, thermal deformations of crust and vessel. In addition, a three-regime model widely used to analyze quenching heat transfer was applied to simplify the calculation compared to the calculation with the boiling curve of previous studies. A sensitivity study for the discretization dimension of the vessel showed that the 1D calculation can substitute the 2D calculation for analyzing the gap cooling experiments. From the sensitivity study, the node size and the time step were proposed as 3 mm and 0.1 s to obtain converged results. Through the extensive validation against the gap cooling experiments with the large-scaled melt mass to 360 kg (LMP200 experiments) as well as the small-scaled melt mass of 30, 50 kg of melt (LAVA and ALPHA experiments), we introduced the correction factors which account for the uncertainties of the degree of local contacts between the melt and reactor vessel and the effect of the solidified debris penetration in the gap on CCFL. We found out that the current model predicted the peak temperatures and the peak times with the error ranges of -15 similar to 15% and -50 similar to 70%, respectively. Finally, the current model was compared with other gap cooling calculation codes.
SEO MOON HEE
학위논문(석사)아주대학교 산업대학원 :정보전자공학과,2012. 2본 논문에서는 반도체 제조공정 중 화학기상증착(CVD : Chemical Vapor Deposition) 공정에서 사용되는 열전달장치(Heater)의 소재 특성과 비교를 연구하였다. 열전달장치(Heater)는 반도체 제조공정에서 원하는 막질을 얻기 위한 필수적인 장치이며 소재 특성에 따라 막질의 두께 및 온도구배의 편차를 확인 할 수 있었다. 본 논문에서 소개되는 열전달장치(Heater)의 소재는 알루미늄과 산화알루미늄이며 알루미늄의 경우 막질을 얻기 위하여 인위적인 플라즈마 인가 시 열전달장치(Heater)에 국부적인 손상(Arcing)을 가져오며 이로 인한 불량을 초래하며 막질에서 우수한 특성을 평가하는 기준인 막질의 두께가 기준치 이하로 감소되는 현상을 가져 온다 또한 소재의 무른 특성으로 인하여 표면에 흠집이 발생되기도 한다. 반면 알루미늄에 산화막을 코팅한 산화알루미늄 열전달장치(Heater)의 경우 알루미늄 열전달장치(Heater)에서 발생되는 국부적 손상(Arcing)에 대해 우수하며 막질 두께 역시 기준치에 도달함을 확인하였다. 본 논문에서는 이러한 두 소재간의 특성을 이해하기 위하여 열 전달계수를 통한 열전달장치(Heater)의 온도구배를 이론값과 실험값을 비교 확인하고 막질의 두께를 검증하여 반도체 제조공정에서의 우수한 막질특성을 유지하며 산화알루미늄으로 코팅된 열전달장치(heater) 사용을 통해 반복되는 불량을 방지하고 우수한 막질특성을 얻을 수 있을 것으로 생각된다.목 차 (List of Text)
국문요약
ABSTRACT
1. 서 론................................................................................1
1.1.반도체 공업............................................................................ 1
1.1.1. 반도체 공업의 특징.................................................................. 1
2. 본 론............................................................................................................... 2
2.1 반도체의 원리와 종류...................................................................... 2
2.1.1 반도체의 원리........................................................................... 2
2.1.2 반도체의 종류........................................................................... 5
2.2. 반도체 제조 원료............................................................................ 7
2.2.1. 실리콘 단결정(single crystal)................................................. 7
2.2.1.1. 초크랄스키법(CZ법) .........................................................8
2.2.1.2. 플롯존법(Float Zone Method, FZ).................................12
2.2.1.3. 그 외의 결정 성장법........................................................15
2.2.2. 반도체 가스와 약품..............................................................15
2.2.2.1. 반도체 특수가스..............................................................15
2.2.2.2. 반도체 화학약품..............................................................18
2.3. 반도체 제조 기술........................................................................19
2.3.1. 웨이퍼 세척..........................................................................19
2.3.1.1. 웨이퍼 표면의 오염원과 오염원의 검출.........................19
2.3.1.2. 웨이퍼 세척 과정...........................................................21
2.3.2. 에칭......................................................................................23
2.3.2.1. 습식 식각.......................................................................23
2.3.2.1.1. 실리콘의 습식 식각.................................................26
2.3.2.1.2. 열산화막의 습식 식각..............................................27
2.3.2.1.3. 질화 실리콘의 습식 식각........................................28
2.3.2.2. 건식 식각.......................................................................29
2.3.3. 이온주입 (Ion Implantation)...................................................33
2.3.3.1. 개요...................................................................................33
2.3.3.2.이온주입 장비.....................................................................36
2.3.3.3. 이온 주입의 특징 및 응용.................................................37
2.3.3.4. 비정질에서의 이온 주입 : 에너지 손실...........................39
2.3.3.5. 단결정에서의 이온 주입....................................................40
2.3.3.6. 손상(Damage) 및 어닐링(Annealing)...............................41
2.3.3.7. 소자 및 집적회로 기술에 미치는 영향..............................43
2.3.4. 박막 증착의 기술 및 공정.......................................................44
2.3.4.1. 개요...................................................................................44
2.3.4.2. 기화법 (Evaporation)........................................................45
2.3.4.3. 화학 기상 증착(Chemical Vapor Deposition).................46
2.3.4.4. 스퍼터 증착(Sputter deposition)......................................51
2.4. 화학기상증착법의 소개.................................................................55
2.4.1. 화학기상증착법 (Chemical Vapor Deposition: CVD)............55
2.4.2. CVD의 정의 및 원리...............................................................58
2.4.3. CVD법의 장점.........................................................................59
2.4.4. CVD법의 단점.........................................................................59
2.4.5. CVD 장비의 기본구성.............................................................60
2.4.6. CVD System 의 분류.............................................................60
2.5. 열전달장치 (Heater)....................................................................68
2.5.1. 열전달장치(Heater) 및 화학기상증착 장비의 구성.................62
2.6.산화알루미늄(Al2O3)과 열전달장치(Heater)의 산화알루미늄 박막형
성....................................................................................................64
2.6.1. 산화알루미늄 (Al2O3)...............................................................64
2.6.2. 열전달장치(Heater)의 산화알루미늄 박막형성........................66
2.6.2.1. 미세양극산화 (Micro Arc Oxidation):MAO.......................66
2.7. 실험의 진행..................................................................................68
2.7.1. 실험결과...................................................................................70
3. 결론.....................................................................................................73참고문헌...................................................................................................74Maste
Reference Intervals of Platelets, Lymphocytes and Cardiac Biomarkers in Umbilical Cord Blood
The umbilical cord blood (UCB) can be used for early detection of neonatal diseases. The UCB can be used for early detection of neonatal diseases. Establishing reference intervals is essential for appropriate interpretation of results of laboratory tests using UCB and for correct medical decisions of pediatricians and neonatologists. The use of proper refer‐ ence intervals provides reliable information to pediatricians and neonatologists; thus, they could make correct medical decisions for neonates. This chapter discussed refer‐ ence intervals of platelets, lymphocytes, and cardiac biomarkers in UCB according to the Clinical Laboratory Standards Institute guidelines. Except iatrogenic anemia, thrombo‐ cytopenia is the most common hematologic abnormality in neonates. Immature platelet fraction is a novel parameter to estimate megakaryopoiesis and can be useful to under‐ stand the mechanism of thrombocytopenia, platelet destruction or bone marrow failure, in neonates. Lymphocyte counts, T cell and B cell, can reflect status of immune system in fetus and neonates. Especially Tregs in UCB may contribute to maintain the immune homeostasis in the feto‐maternal relationship, and the presence of Tregs would be essen‐ tial to prevent immune dysregulation in fetus and neonates. Congenital heart disease or defect is the most common birth defect in newborns. Cardiac biomarkers are essential to evaluate heart function and to give information of myocardial injury, necrosis, or myo‐ cardial stretch. There are no current guidelines for their routine use in children
sj-docx-1-cll-10.1177_09636897221113789 – Supplemental material for Results of Multicenter Phase II Study With Imatinib Mesylate in Allogeneic Recipients With Steroid-Refractory Chronic GVHD
Supplemental material, sj-docx-1-cll-10.1177_09636897221113789 for Results of Multicenter Phase II Study With Imatinib Mesylate in Allogeneic Recipients With Steroid-Refractory Chronic GVHD by Dong Won Baek, Hee Jeong Cho, Ju-Hyung Kim, Jae Sook Ahn, Hyeoung-Joon Kim, Sung Nam Lim, Jun Won Cheong, Sung-Yong Kim, Ho Sup Lee, Jong Ho Won, Ho-Young Yhim, Sang Kyun Sohn and Joon Ho Moon in Cell Transplantation</p
Design of a universal middleware bridge for device interoperability in heterogeneous home network middleware
This paper proposes the design of the software Universal Middleware Bridge (UMB) that can be used to solve seamless interoperability problems caused by the heterogeneity of several kinds of home network middleware. We verified that the proposed UMB dynamically maps physical devise in all different middleware domains into virtually abstracted devices in the UMB domain and enables all home devices overlaid on heterogeneous networks to be seen as virtually the same physical devices in the same middleware domain, as well as to detect and control each other. As a result, it is concluded that the proposed architecture provides commercial feasibility and cost benefic for the system implementations(1).The authors wish to thank Professors Young-Hee Lee for his
contributions to design of UMB
Fig. 5 in Meroterpenoids from the leaves of Psidium guajava (guava) cultivated in Korea using MS/MS-based molecular networking
Fig. 5. Hypotheticlal biogenetic pathway of all the isolates (1–10).Published as part of Ryu, Byeol, Cho, Hyo Moon, Zhang, Mi, Lee, Ba Wool, Doan, Thi Phuong, Park, Eun Jin, Lee, Hee Ju & Oh, Won Keun, 2021, Meroterpenoids from the leaves of Psidium guajava (guava) cultivated in Korea using MS/MS-based molecular networking, pp. 1-12 in Phytochemistry (112723) 186 on page 10, DOI: 10.1016/j.phytochem.2021.112723, http://zenodo.org/record/825863
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