1,722,820 research outputs found
The effects of the annealed temperature on properties of CVD Cu films
No full text학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iii, 63 p. ]한국과학기술원 : 전자재료공학과
Cycle-CVD 법으로 증착된 Ti-N, Ti-Si-N 박막의 ALD 증착기구와 특성에 관한 연구
No full text학위논문(박사) - 한국과학기술원 : 재료공학과, 1999.8, [ xi, 110 p. ]Cu is considered as the most promising alternative to Al-based alloy for the interconnection materials in Si-based intergrated circuits due to its low resistivity and superior resistance to electromigration and stress voiding. However, one of the major drawbacks of Cu is its fast diffusion/drift in Si and most commonly used dielectrics, resulting in deterioration of devices at low temperatures. Hence, a diffusion barrier is necessary between Cu and Si.
In this paper, as Cu diffusion barriers, titanium-nitride (Ti-N) and titanium-silicon-nitride (Ti-Si-N) films have been successfully grown by atomic layer deposition (ALD). The film growth kinetics were studied using the concept of ALD and also excellent film characteristics were confirmed.
As a preliminary experiment, Ti-N ALD on at the substrate temperature of 200℃ has been investigated by alternate supply of reactant sources, [tetrakis(ethylmethylamino)titanium: TEMAT] and . Ti-N deposition thickness/cycle was s turated at around 1.6 mono-layers per cycle (ML/cycle) with sufficient pulse times of reactant gases at 200℃. The results suggest that Ti-N deposition thickness/cycle could exceed 1 ML/cycle in ALD, and are explained by the re-adsorption mechanism of the reactant gases. An ideal linear relationship between number of cycles and Ti-N film deposition thickness was confirmed.
Step coverage was excellent, particles may be caused by the gas phase reactions between TEMAT and were almost absent because TEMAT was separated from by the Ar pulse. In spite of relatively low deposition temperature, carbon impurity in ALD Ti-N films was incorporated below 4 at.% compared with above 25 at.% in MOCVD Ti-N films.
With the ALD concept from Ti-N ALD using TEMAT and , Ti-Si-N thin films have been grown by ALD using a sequential supply of [tetrakis(dimethylamido) titanium: TDMAT], ammonia and silane at the substrate temperature of 180℃ and th...한국과학기술원 : 재료공학과
Supervisory control of a robotic wheelchair system & new interface for the disabled
No full text학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.8, [ viii, 79 p ]한국과학기술원 : 기계공학전공
Enhanced production of tyrosine from acetate in Escherichia coli by engineering of glyoxylate cycle
No full textDirectly Spray-Deposited Large-Scale Quantum Dot Films through Tailoring the Evaporation Rate of Solution Droplet
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Colloidal Quantum Dot Solar Cells Based on Directly Spray-deposited Large-scale Quantum Dot Films
No full textGoing Beyond Counting First Authors in Author Co-citation Analysis
Get PDFThe present study examines one of the fundamental aspects of author co-citation analysis (ACA) - the way co-citation
counts are defined. Co-citation counting provides the data on which all subsequent statistical analyses and mappings
are based, and we compare ACA results based on two different types of co-citation counting - the traditional type that
only counts the first one among a cited work's authors on the one hand and a non-traditional type that takes into
account the first 5 authors of a cited work on the other hand. Results indicate that the picture produced through this non-traditional author co-citation counting contains more coherent author groups and is therefore considerably clearer. However, this picture represents fewer specialties in the research field being studied than that produced through the traditional first-author co-citation counting when the same number of top-ranked authors is selected and analyzed. Reasons for these effects are discussed
Evaluation of Immunoproteasome-Specific Proteolytic Activity Using Fluorogenic Peptide Substrates
No full textThe 26S proteasome irreversibly hydrolyzes polyubiquitylated substrates to maintain protein homeostasis; it also regulates immune responses by generating antigenic peptides. An alternative form of the 26S proteasome is the immunoproteasome, which contains substituted catalytic subunits (β1i/PSMB9, β2i/PSMB10, and β5i/PSMB8) instead of constitutively expressed counterparts (β1/PSMB6, β2/PSMB7, and β5/PSMB5). The immunoproteasome expands the peptide repertoire presented on MHC class I molecules. However, how its activity changes in this context is largely elusive, possibly due to the lack of a standardized methodology to evaluate its specific activity. Here, we describe an assay protocol that measures the immunoproteasome activity of whole-cell lysates using commercially available fluorogenic peptide substrates. Our results showed that the most accurate assessment of immunoproteasome activity could be achieved by combining β5i-targeting substrate Ac-ANW-AMC and immunoproteasome inhibitor ONX-0914. This simple and reliable protocol may contribute to future studies of immunoproteasomes and their pathophysiological roles during viral infection, inflammation, and tumorigenesis
시냅스 세포 부착 분자가 노랑초파리의 털 손질 (그루밍) 행동에 미치는 영향
No full textSynaptic cell adhesion molecule (synCAM);Down syndrome cell adhesion molecule 1 (Dscam1);Grooming;GABA;Drosophila MelanogasterMasterdCollectio
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