5,875 research outputs found

    Development of MIM structures based on titanium dioxide for DRAM applications

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    Le développement des mémoires dynamiques (DRAM) à haute performance basées sur la structure métal-isolateur-métal (MIM) nécessite de remplacer la couche de dioxyde de silicium par des matériaux diélectriques à haute permittivité diélectrique. L'utilisation de ces isolants dits high-k permet de réduire la taille du dispositif DRAM tout en conservant une densité de capacité élevée et un faible courant de fuite pour diminuer la fréquence de rafraichissement. Parmi les nombreux matériaux high k, le dioxyde de titane (TiO2) est l'un des candidats les plus prometteurs en raison de sa constant diélectrique relativement élevée pouvant atteindre 170 dans le TiO2 cristallisé en phase rutile. De plus, il est possible d’obtenir cette phase à basse température par le procédé ALD (< 250 °C) si le dépôt est réalisé sur un substrat RuO2 (phase rutile) grâce à une très faible différence de paramètres de maille entre les deux matériaux. L'objectif principal de cette thèse est d'étudier les mécanismes des réactions chimiques qui se produisant à l'interface RuO2/TiO2 lors du dépôt et leur influence sur les propriétés structurales et diélectriques du film TiO2, en particulier l'influence des espèces oxydantes, le plasma O2 et le H2O. L’influence des électrodes supérieure et inferieures sur les propriétés électriques et structurales de TiO2 a également été étudiée. Ensuite, la constante diélectrique, la conductivité ac et la tangente de perte des structures MIM à base d’oxyde de titane dopé aluminium ont été étudiés dans une gamme de fréquences large bande, de 1 Hz à 2 GHz. Enfin, la réalisation des MIM tridimensionnelles (3D) utilisant un substrat de silicium structuré en réseaux des trous coniques denses a été démontrée. Les structures MIM 3D réalisées ont permis d’augmenter sensiblement la densité de capacité tout en gardant de bonnes performances en termes de courant de fuite.The development of high performance dynamic random access memory (DRAM) based on metal-insulator-metal (MIM) structure made it necessary to replace the conventional silicon dioxide layer by dielectric materials with high dielectric constants. The use of these so-called high-k insulators allows aggressive scaling of DRAM devices while keeping high capacitance density and, more importantly, low leakage current. Among the numerous high k dielectrics, titanium dioxide (TiO2) is one of the most attractive candidate due to its rather high dielectric constant (k). Rutile TiO2 is the interesting phase due to its high dielectric constant and the possibility to deposit this phase at low temperature by ALD (< 250 °C) by using RuO2 substrate thanks to a very small lattice mismatch between the two materials. The main objective of this thesis is to investigate the surface chemical reactions mechanisms at the RuO2/TiO2 interface and their influence on the ALD TiO2 film properties, especially the influence of oxidizing species, namely, H2O or O2 plasma. The influence of bottom and top electrode on electrical and structural proprieties of TiO2 MIM structure was also studied. Then, the dielectric constant, the ac conductivity and the loss tangent of aluminum doped titanium oxide are measured through a wide band frequency range, from 1 Hz to 2 GHz. Finally, the feasibility of three-dimensional (3D) MIM structures was studied by using dense array of truncated conical holes etched in a silicon substrate. The 3D MIM capacitors showed a large increase in the capacitance density while retaining very good electrical properties especially a leakage current comparable to planar MIM devices

    Implementation of KH Ahmad Dahlan's educational thoughts in the merdeka curriculum

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    This research aims to see how the thoughts of KH Ahmad Dahlan are implemented in the kurikulum merdeka that is being promoted by the government through KEMDIKBUDRISTEK. The research method used is a literature review where the author collects data on the educational thoughts of KH Ahmad Dahlan, independent curriculum and discusses how it is implemented. The results of the study show that the thoughts of KH Ahmad Dahlan are implemented in the independent curriculum in several aspects including: in the education system, namely the integration of religious and Scientific knowledge curricula, in the aspect of educational goals, namely the formation of students who are religiously knowledgeable and intelligent in insight and scientific views which are reflected in the Pancasila student profile, in terms of technical implementation, namely indications of pending development of educational implementation, in terms of learning methods namely contextual learning which is reflected in intracurricular and cocurricular learning models on independent curriculum. In addition to these four aspects, both KH Ahmad Dahlan and the concept of independent curriculum focus on developing students both individually and socially. The implication of this research is the formation of educational institutions that truly become an answer to the needs of students in facing the development of time, not just schools as a formality to get a diploma. As for educators, they should be more open-minded so that they are ready to develop and ready to become a solution for student development

    Estudio de la influencia de la morfología y de la distribución de tamaños de partícula del polvo en la obtención de aleaciones base Cu y base Ni mediante la tecnología MIM

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    En las últimas dos décadas, el procesado mediante moldeo por inyección de polvos metálicos (MIM) ha sido una tecnología que ha experimentado un notable crecimiento año tras año debido a que constituye una alternativa rentable para la fabricación de piezas de pequeño tamaño y difícil geometría. Sin embargo, una de sus mayores limitaciones como tecnología es el alto coste que presentan los polvos metálicos con morfología esférica y pequeño tamaño de partícula que se utilizan normalmente en esta ruta de procesado. En el presente trabajo de investigación se ha estudiado la influencia de la morfología del polvo metálico y de la distribución de tamaños de partícula del mismo sobre cada una de las etapas que constituyen el procesado MIM. El objetivo principal es determinar la viabilidad de la sustitución total o parcial del tipo de polvo que se utiliza actualmente (atomizado en gas) por otros tipos de polvo más económicos. Para llevar a cabo este estudio, se seleccionaron dos materiales metálicos cuyo procesado mediante MIM presentara interés industrial. Se eligió un bronce (90Cu/10Sn) y una superaleación base níquel (Inconel 718). Ambos materiales fueron mezclados con un ligante formado por polietileno de alta densidad (HDPE) y cera parafínica utilizando además, en el caso del Inconel 718, ácido esteárico como agente surfactante. Este sistema ligante multicomponente es económicamente asequible y su abastecimiento está garantizado en el tiempo por lo que constituye una solución adecuada para su aplicación industrial. En la fabricación de las mezclas polvo-ligante se han utilizado polvos de diferente geometría y distribuciones de tamaño de partícula distinta. Por un lado se busca reducir el precio del “feedstock” (mezcla polvo-ligante) y, por otro, aumentar el empaquetamiento para reducir la viscosidad de las mezclas consiguiendo de este modo aumentar la carga sólida y mejorar el control dimensional sobre los componentes. Medidas reológicas y del par de torsión permitieron evaluar el contenido de polvo óptimo de cada mezcla polvoligante para llevar a cabo el proceso de moldeo del material. Además, el estudio de diferentes parámetros reológicos como la viscosidad, el índice de flujo, la energía de activación y el esfuerzo umbral ha permitido determinar cómo influye la morfología y distribución de tamaños de partícula del polvo sobre su procesabilidad. Una vez determinados los contenidos de polvo óptimos en cada caso, se procedió a la fabricación de componentes en verde (formados por el polvo metálico y el ligante) mediante moldeo por inyección de las diferentes mezclas. Para realizar una inyección satisfactoria fue necesario optimizar parámetros como la temperatura, el volumen, la presión y el flujo de inyección de modo que las piezas obtenidas no presentaran defectos de fabricación y fueran lo suficientemente resistentes para soportar la manipulación necesaria en las etapas posteriores. Al mismo tiempo, se estudió la facilidad de procesado de cada mezcla relacionándola con las características del polvo utilizado en cada caso. A continuación, se intentó determinar cuáles eran las técnicas de eliminación del ligante más convenientes teniendo en cuenta los materiales y los sistemas ligantes utilizados. A través de la caracterización térmica (TGA, DSC) del sistema ligante y de los “feedstocks” fabricados, se definieron las condiciones más adecuadas para llevar a cabo el proceso y, del mismo modo que en los casos anteriores, se estudió cómo influyen las características del polvo en el proceso de eliminación. Finalmente, se realizó la sinterización de los materiales, determinando las condiciones óptimas del proceso. Las piezas obtenidas fueron estudiadas evaluando algunas propiedades físicas y mecánicas como la densidad, porosidad y la dureza. Tanto el proceso de sinterización como las propiedades finales fueron relacionados con las características del polvo de partida. ________________________________________________In the present Ph. D thesis, the influence of particle morphology and size distribution of the powder on the different stages of Powder Injection Moulding process (PIM) has been investigated. The aim of this work is to determine the optimal powder characteristics to carry out the process, just as to study the viability of the total or partial replacing of the gas atomised powder, nowadays used in this technology, with other kinds of more economical powders. The study was performed using different bronze (90Cu/10Sn) and superalloy Inconel 718 powders in order to fabricate powder-binder mixtures employing different particle morphologies and particle size distributions. The rheological properties determination of the powder-binder mixtures allowed knowing the optimal solids loading for the green components fabrication through injection moulding. Next, the more convenient conditions to carry out the binder elimination process were established and sintering of the materials was performed under different atmospheres and thermal cycles. Finally, the sintered components were characterized and the results were compared having into account the features of the powder used for their fabrication

    Etude des structures MIM à base de dioxyde de titane pour des applications DRAM

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    The development of high performance dynamic random access memory (DRAM) based on metal-insulator-metal (MIM) structure made it necessary to replace the conventional silicon dioxide layer by dielectric materials with high dielectric constants. The use of these so-called high-k insulators allows aggressive scaling of DRAM devices while keeping high capacitance density and, more importantly, low leakage current. Among the numerous high k dielectrics, titanium dioxide (TiO2) is one of the most attractive candidate due to its rather high dielectric constant (k). Rutile TiO2 is the interesting phase due to its high dielectric constant and the possibility to deposit this phase at low temperature by ALD (< 250 °C) by using RuO2 substrate thanks to a very small lattice mismatch between the two materials. The main objective of this thesis is to investigate the surface chemical reactions mechanisms at the RuO2/TiO2 interface and their influence on the ALD TiO2 film properties, especially the influence of oxidizing species, namely, H2O or O2 plasma. The influence of bottom and top electrode on electrical and structural proprieties of TiO2 MIM structure was also studied. Then, the dielectric constant, the ac conductivity and the loss tangent of aluminum doped titanium oxide are measured through a wide band frequency range, from 1 Hz to 2 GHz. Finally, the feasibility of three-dimensional (3D) MIM structures was studied by using dense array of truncated conical holes etched in a silicon substrate. The 3D MIM capacitors showed a large increase in the capacitance density while retaining very good electrical properties especially a leakage current comparable to planar MIM devices.Le développement des mémoires dynamiques (DRAM) à haute performance basées sur la structure métal-isolateur-métal (MIM) nécessite de remplacer la couche de dioxyde de silicium par des matériaux diélectriques à haute permittivité diélectrique. L'utilisation de ces isolants dits high-k permet de réduire la taille du dispositif DRAM tout en conservant une densité de capacité élevée et un faible courant de fuite pour diminuer la fréquence de rafraichissement. Parmi les nombreux matériaux high k, le dioxyde de titane (TiO2) est l'un des candidats les plus prometteurs en raison de sa constant diélectrique relativement élevée pouvant atteindre 170 dans le TiO2 cristallisé en phase rutile. De plus, il est possible d’obtenir cette phase à basse température par le procédé ALD (< 250 °C) si le dépôt est réalisé sur un substrat RuO2 (phase rutile) grâce à une très faible différence de paramètres de maille entre les deux matériaux. L'objectif principal de cette thèse est d'étudier les mécanismes des réactions chimiques qui se produisant à l'interface RuO2/TiO2 lors du dépôt et leur influence sur les propriétés structurales et diélectriques du film TiO2, en particulier l'influence des espèces oxydantes, le plasma O2 et le H2O. L’influence des électrodes supérieure et inferieures sur les propriétés électriques et structurales de TiO2 a également été étudiée. Ensuite, la constante diélectrique, la conductivité ac et la tangente de perte des structures MIM à base d’oxyde de titane dopé aluminium ont été étudiés dans une gamme de fréquences large bande, de 1 Hz à 2 GHz. Enfin, la réalisation des MIM tridimensionnelles (3D) utilisant un substrat de silicium structuré en réseaux des trous coniques denses a été démontrée. Les structures MIM 3D réalisées ont permis d’augmenter sensiblement la densité de capacité tout en gardant de bonnes performances en termes de courant de fuite

    PENINGKATAN KETERAMPILAN BERFIKIR KRITIS SISWA PADA MATA PELAJARAN IPA MENGGUNAKAN MODEL PEMBELAJARAN INQUIRI DI KELAS V MIM PANDANSARI

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    Penelitian ini bertujuan untuk meningkatkan keterampilan berfikir kritis siswa pada mata pelajaran Ilmu Pengetahuan Alam (IPA) melalui model pembelajaran inquiri. Penelitian ini merupakan Penelitian Tindakan Kelas yang dilaksanakan dalam II siklus, satu siklus terdiri dari dua kali pertemuan, satu pertemuan terdiri dari 2x35 menit. Subyek penelitian adalah siswa kelas V MIM Pandansari sebanyak 22 dari 13 laki-laki dan 9 perempuan. Prosedur pelaksanaan setiap siklus meliputi perencanaan, pelaksanaan tindakan, observasi dan refleksi. Berdasarkan hasil penelitian, menunjukkan bahwa sikap berfikir kritis siswa pada siklus I diperoleh rata-rata 73,97 dengan kriteria baik dan meningkat pada siklus II diperoleh rata-rata 79,42 dengan kriteria baik. Hasil penelitian tersebut menunjukan bahwa penerapan model pembelajaran inquiri dapat meningkatkan sikap berfikir kritis siswa pada mata pelajaran IPA di kelas V MIM Pandansari Kecamatan Ajibarang Kabupaten Banyumas

    Developing Guidebook of Sexual Violence Prevention and Control in Universitas Ahmad Dahlan

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    Higher education should be a safe and comfortable place for students to receive education. However, in reality, many cases of sexual violence occur in the university environment. Many victims of sexual violence do not dare to report the incident to the authorities. Meanwhile, some victims who have reported their cases have not received a resolution to the problems they complained about. Based on the results of a student needs survey, as many as 64.7% of students need a guidebook for preventing and controlling sexual violence. Based on the survey results, the author aims to research and develop a guidebook for preventing and controlling sexual violence. After going through four stages of R&amp;D 4D model, this guidebook contains the background, scope, juridical and empirical studies, and mechanisms for preventing and controlling sexual violence. Based on the results of media expert validation tests, this book obtained an Index Aiken’s V Coefficient of 0.81 which is in the high category. Meanwhile, the results of material expert validation tests show that the Index Aiken’s V Coefficient of this book is 0.83, which is also included in the high category. This guidebook will be used as a reference in realizing efforts to prevent and overcome sexual violence in the higher education environment, especially at Universitas Ahmad Dahlan

    Flexible superconducting ceramic polymer composites and method of making same, U.S. Patent 5,108,981

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    Superconducting ceramic material is woven into an interconnected structure and embedded in a polymer to produce a flexible, superconducting ceramic material. The polymer also provides protection from moisture. The ceramic polymer composite is fabricated by soaking a carbon fabric in a solution of metal nitrates, ethylene glycol and citric acid to yield a nominal composition of, for example, YBa2Cu3O7-x. Heat treatment results in the decomposition of the nitrates, organics and carbon fabric to produce an interconnected structure of the superconducting ceramic material which takes the shape of the original carbon fabric on a reduced scale. In addition, the processing conditions yield significant grain orientation. The superconducting grains of the ceramic material align along the direction of the original fabric weave which provides an improvement of the critical current densities

    TAFSIR DAN PEMBAHARUAN PEMIKIRAN ISLAM DI INDONESIA ERA KEMERDEKAAN: (STUDI ANALISIS KITAB TAFSIR AL-FURQAN KARYA AHMAD HASSAN)

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    The conflict dynamics of revivalist and traditionalist Islamic groups always colorize development of ideological contest of religious live in Indonesia. One of the important episodes of this conflict dynamic occurred in the era of independence. Through this paper, the author is interested in portraying episodes of Islamic Revivalist dynamics in the independence era through the thoughts and works of influential revivalist scholars, namely Ahmad Hassan.  This study aims to reveal the form of mediation of Ahmad Hassan's Islamic renewal in his book of tafsir Al-Furqan. The author uses a descriptive method of analysis with literature study techniques in reviewing the interpretation of Al-Furqan as the main object of research. The results showed that in mediating Ahmad Hassan's Islamic renewal, Kitab tafsir Al-Furqan accommodates and mediates Islamic renewal in two ways, namely formative and substantive ways.  Formative way of mediation is indicated through the form of tafsir Al-Furqan as a literal and meaningful translation of tafsir. Critically, this form of translation aimed to make Al-Furqan accessible for Indonesian people at that time when they haven’t had proper understanding on Arabic literacy so that people could understand and refer to the meaning of the Qur'an directly. This is in line with Ahmad Hassan's renewal though about the Qur'an and hadith as the main sources of muslims. As for the substantive ways of mediation, tafsir Al-Furqan contains and expresses the thoughts of Ahmad Hassan's renewal as a substance in interpreting the verses of the Qur'an

    High performance optical systems using mim based plasmonic structures

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    © 2017 The Author(s). In this paper, the design of high performance optical systems based on MIM based plasmonic structures is proposed. Using a design methodology based on optimization functions, two novel components are proposed: demultiplexer and gas sensor. Further optimization of these plasmonic systems, high performance optical demultiplexer is maintained with a narrow line-width down to 4 nm with acceptable power level around 30%. On the other side, highly sensitive optical sensor is proposed with sensitivity up to 2000 nm and a limit of detection down to 10−4

    Homogenous feedstock for metal injection molding (MIM) process / Yusb Ishaq Mohamad and Mior Sharul Nizam Mior Ahmad

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    Metal Injection Moulding (MIM) has become the important production process, which combines the basic principles of plastic injection moulding process with powder metallurgy process. This process is suitable for high volume production of small parts with complex shape at low cost compared to other metal processing such as casting and machining. Each step in MIM process plays a vital role in order to achieve high quality final product. The main application of the MIM process is to produce products of complex shapes having excellent mechanical properties. The study using 316L stainless steel powders with 16 µm particles size and a composite binder system whose main constituents are polyethylene glycol (PEG), which are water soluble binder system and finely dispersed polymethyl methacrylate (PMMA). Feedstocks were prepaid by hot mixing process and subsequently compacted by hot-press compaction method to form a specimen with 30 mm diameter and 3 mm thickness. Three different PEG % weight composition; 65 %, 75 % and 85 % with 63 % powder loading were studied. Focus was given to determine the homogeneity of the feedstock. Result show that increasing of PEG % composition would increase the value of viscosity. Under SEM composition, the presence of voids in fractured surface believed to be due to entrapped air during compaction process. This will cause inhomogeneity of the feedstock. The result also show that 75 % PEG composition gives better homogeneity, which is associated with higher density and strength of the green body
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