1,720,959 research outputs found
Reliability of the scanning capacitance microscopy and spectroscopy for the nanoscale characterization of semiconductors and dielectrics
No full textCe travail a été dédié à l\u27étude expérimentale des mesures capacitives avec le microscope à force atomique (AFM) pour la caractérisation des profils des dopants dans des structures semiconductrices et pour la caractérisation des oxydes minces. La SCM est une méthode de caractérisation très utile pour les mesures de défaillance des profils des dopants, par exemple pour vérifier si des différentes étapes technologique s comme l\u27implantation des dopants dans des substrats semiconducteurs a été correctement effectuée. Nous avons démontré le potentiel de la SCM pour la caractérisation des profils des dopants en utilisant des échantillons de test qui couvrent à peu prés toutes les structures semiconductrices rencontrées dans l\u27industrie de la microélectronique: des profils des dopants, de type escalier, des puits quantiques, des jonctions p-n. Des images qualitatives ont été obtenues sur des échantillons contenant des profils des dopants des concentrations entre 2.e+15 at.cm-3 et 5.e+19cm-3. Nous avons montré que la SCM est capable de détecter des puits quantiques avec une épaisseur d\u27environ 7 nm. La SCM est capable de faire la différence entre les dopants de type n et les dopants de type p. Tous ces résultats confirment l\u27utilité de la SCM comme méthode de caractérisation qualitative des profils des dopants à nano-échelle. Nous avons aussi étudié les paramètres expérimentaux qui jouent un rôle dans l\u27interprétation et la reproductibilité du signal capacitif: la lumière laser parasite provenant du système de détection de l\u27AFM, des couplage capacitifs parasites, les problèmes de contact entre la sonde AFM et l\u27échantillon, l\u27influence des champs électriques forts générés par la sonde AFM, la topographie des échantillons, la qualité et les propriétés de l\u27oxyde de grille. Nous avons proposé des solutions pour l\u27élimination de tous ces facteurs parasites et pour l\u27avancement de la SCM vers des mesures reproductibles et quantifiables
Fiabilité de la SCM et de la SCS pour la caractérisation à la nano-échelle des semiconducteurs et des diélectriques
No full textCe travail a été dédié à l'étude expérimentale des mesures capacitives avec le microscope à force atomique (AFM) pour la caractérisation des profils des dopants dans des structures semiconductrices et pour la caractérisation des oxydes minces. La SCM est une méthode de caractérisation très utile pour les mesures de défaillance des profils des dopants, par exemple pour vérifier si des différentes étapes technologique s comme l'implantation des dopants dans des substrats semiconducteurs a été correctement effectuée. Nous avons démontré le potentiel de la SCM pour la caractérisation des profils des dopants en utilisant des échantillons de test qui couvrent à peu prés toutes les structures semiconductrices rencontrées dans l'industrie de la microélectronique: des profils des dopants, de type escalier, des puits quantiques, des jonctions p-n. Des images qualitatives ont été obtenues sur des échantillons contenant des profils des dopants des concentrations entre 2.e+15 at.cm-3 et 5.e+19cm-3. Nous avons montré que la SCM est capable de détecter des puits quantiques avec une épaisseur d'environ 7 nm. La SCM est capable de faire la différence entre les dopants de type n et les dopants de type p. Tous ces résultats confirment l'utilité de la SCM comme méthode de caractérisation qualitative des profils des dopants à nano-échelle. Nous avons aussi étudié les paramètres expérimentaux qui jouent un rôle dans l'interprétation et la reproductibilité du signal capacitif: la lumière laser parasite provenant du système de détection de l'AFM, des couplage capacitifs parasites, les problèmes de contact entre la sonde AFM et l'échantillon, l'influence des champs électriques forts générés par la sonde AFM, la topographie des échantillons, la qualité et les propriétés de l'oxyde de grille. Nous avons proposé des solutions pour l'élimination de tous ces facteurs parasites et pour l'avancement de la SCM vers des mesures reproductibles et quantifiables.This work was devoted to the experimental study of the scanning capacitance microscopy (SCM) and spectroscopy (SCS) for the mapping of the dopants in the semiconductor structures and for the characterization of thin oxides. SCM has appeared to be a very powerful technique for doping mapping as long as qualitative images are needed, for example in order to check whether fabrication steps like implantations have been correctly operated during the fabrication of devices (presence or absence of doping of a given type in a region where it should be present). When quantitativity is needed, the only way of performing a calibration of SCM images for dopant mapping seems to grow exactly the same oxide on two different samples, one being a calibration sample from which a semi-calibration curve associating doping levels and SCM signal levels will be measured and applied to the unknown sample (semi-calibration). We have shown the capabilities of SCM for dopant mapping using a series of experimental situations and test samples covering almost all frequently encountered structures in the industry of silicon microelectronics : doping staircases of p-type and n-type structures, quantum wells and p-n junctions. Qualitative images have been obtained for a wide range of doping levels between 2.e+15 at.cm-3 to 5.e+19 at.cm-3. SCM is able to detect quantum wells of ~ 7 nm width. SCM is also able to differentiate between dopants of different type (p-type or n-type). All these results confirm the usefulness of SCM as a qualitative imaging technique. We have studied the experimental parameters playing a role in the interpretation and reproducibility of SCM signal: stray light, stray capacitance, the tip-sample contact, the influence of strong electrical fields, the sample s topography, the quality and the properties of the top oxide. We have proposed solutions for eliminating all these parasitic factors and for rendering the SCM measurements reproducible and quantitativeVILLEURBANNE-DOC'INSA LYON (692662301) / SudocSudocFranceF
Going Beyond Counting First Authors in Author Co-citation Analysis
Full text linkThe present study examines one of the fundamental aspects of author co-citation analysis (ACA) - the way co-citation
counts are defined. Co-citation counting provides the data on which all subsequent statistical analyses and mappings
are based, and we compare ACA results based on two different types of co-citation counting - the traditional type that
only counts the first one among a cited work's authors on the one hand and a non-traditional type that takes into
account the first 5 authors of a cited work on the other hand. Results indicate that the picture produced through this non-traditional author co-citation counting contains more coherent author groups and is therefore considerably clearer. However, this picture represents fewer specialties in the research field being studied than that produced through the traditional first-author co-citation counting when the same number of top-ranked authors is selected and analyzed. Reasons for these effects are discussed
Reliability of the Scanning Capacitance Microscopy and Spectroscopy for the nanoscale characterization of semiconductors and dielectrics
No full textThis work was devoted to the experimental study of the scanning capacitance microscopy (SCM) and spectroscopy (SCS) for the mapping of the dopants in the semiconductor structures and for the characterization of thin oxides. SCM has appeared to be a very powerful technique for doping mapping as long as qualitative images are needed, for example in order to check whether fabrication steps like implantations have been correctly operated during the fabrication of devices (presence or absence of doping of a given type in a region where it should be present). When quantitativity is needed, the only way of performing a calibration of SCM images for dopant mapping seems to grow exactly the same oxide on two different samples, one being a calibration sample from which a semi-calibration curve associating doping levels and SCM signal levels will be measured and applied to the unknown sample (semi-calibration). We have shown the capabilities of SCM for dopant mapping using a series of experimental situations and test samples covering almost all frequently encountered structures in the industry of silicon microelectronics : doping staircases of p-type and n-type structures, quantum wells and p-n junctions. Qualitative images have been obtained for a wide range of doping levels between 2.e+15 at.cm-3 to 5.e+19 at.cm-3. SCM is able to detect quantum wells of ~ 7 nm width. SCM is also able to differentiate between dopants of different type (p-type or n-type). All these results confirm the usefulness of SCM as a qualitative imaging technique. We have studied the experimental parameters playing a role in the interpretation and reproducibility of SCM signal: stray light, stray capacitance, the tip-sample contact, the influence of strong electrical fields, the sample s topography, the quality and the properties of the top oxide. We have proposed solutions for eliminating all these parasitic factors and for rendering the SCM measurements reproducible and quantitativeVILLEURBANNE-DOC'INSA LYON (692662301) / SudocSudocFranceF
Variations on the Author
Full text link“Variations on the Author” discusses two of Eduardo Coutinho’s recent films (Um Dia na Vida, from 2010, and Últimas Conversas, posthumously released in 2015) and their contribution to the general question of documentary authorship. The director’s filmography is characterized by a consistent yet self-effacing form of authorial self-inscription: Coutinho often features as an interviewer that rather than express opinions propels discourses; an interviewer that is good at listening. This mode of self-inscription characterizes him as an author who is not expressive but who is nonetheless markedly present on the screen. In Um Dia na Vida, however, Coutinho is completely absent form the image, while Últimas Conversas, on the contrary, includes a confessional prologue that moves the director from the margins to the center of his films. This article examines the ways in which these works stand out in the filmography of a director who offers new insights into the notion of cinematic authorship
Appropriate Similarity Measures for Author Cocitation Analysis
Full text linkWe provide a number of new insights into the methodological discussion about author cocitation analysis. We first argue that the use of the Pearson correlation for measuring the similarity between authors’ cocitation profiles is not very satisfactory. We then discuss what kind of similarity measures may be used as an alternative to the Pearson correlation. We consider three similarity measures in particular. One is the well-known cosine. The other two similarity measures have not been used before in the bibliometric literature. Finally, we show by means of an example that our findings have a high practical relevance.information science;Pearson correlation;cosine;similarity measure;author cocitation analysis
Dispelling the Myths Behind First-author Citation Counts
Full text linkWe conducted a full-scale evaluative citation analysis study of scholars in the XML research field to explore just how different from each other author rankings resulting from different citation counting methods actually are, and to demonstrate the capability of emerging data and tools on the Web in supporting more realistic citation counting methods. Our results contest some common arguments for the continued
use of first-author citation counts in the evaluation of scholars, such as high correlations between author rankings by first-author citation counts and other citation
counting methods, and high costs of using more realistic citation counting methods that are not well-supported by the ISI databases. It is argued that increasingly available digital full text research papers make it possible for citation analysis studies to go beyond what the ISI databases have directly supported and to employ more
sophisticated methods
koamabayili/VECTRON-author-checklist: VECTRON author checklist
No full textWe have done our best to complete the author checklist relating to the use of animals in the hut study. Note that the objective for the hut study was to evaluate the IRS treatment applications for residual efficacy against Anopheles mosquitoes, including the local An. coluzzii mosquito population. Cows were only used to attract mosquitoes into the huts and no tests were carried out directly on the cows. The author checklist is intended for use with studies where experiments are carried out on animals, which is why we have had such difficulty in completing this for the hut study, as many of the questions do not relate to how the cows were used
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