1,720,978 research outputs found
Novel molecular resist based on derivative of cholic acid
No full textGlycerol tris(glutarate 3-(tert-butyl cholate) ester) was synthesized as a low molecular weight amorphous resist material for 193-nm lithography, and it has good transmittance at 193 nm and good dry etch resistance to CF4 reactive ion etching. The resist formulated with this material forms well defined line and space patterns at a dose of 12 mJ cm(-2) using a mercury-xenone lamp in a contact printing mode.Ministry of Commerce, Industry & Energy
KAIST
BK2
Adhesion-promoted copolymers based on norbornene derivatives and maleic anhydride for 193-nm photoresists
No full textA copolymer of t-butyl 5-norbornene-2-carboxylate, 2-(2-methoxyethoxy)ethyl 5-norbornene-2-carboxylate, norbornene, and maleic anhydride was synthesized as a matrix polymer for ArF excimer laser lithography. Hydrophilic 2-(2-methoxyethoxy)ethyl ester groups are introduced into side chains of the matrix polymer in order to improve adhesion to a silicon substrate without causing cross-linking during a lithographic process. The resist formulated with the polymer shows better adhesion to a silicon substrate as the mole fraction of 2-(2-methoxyethoxy)ethyl 5-norbornene-2-carboxylate increases. 0.15 mu m line and space patterns were obtained at a dose of 10.5 mJ cm(-2) using an ArF excimer laser stepper. (C) 2000 Published by Elsevier Science Ltd. All rights reserved.KAIST
Korea Science and Engineering Foundation Ministry of Commerce, Industry and Energ
Poly(isobornyl methacrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam) for an environmentally stable chemically amplified resist
No full textPoly(isobornyl methacrylate-co-3-(t-butoxycarbonyl)-1-vinyl-2-caprolactam) was synthesized and evaluated as a new matrix polymer for a deep UV resist. The polymer has low absorbance at 248 nm (absorbance: 0.014-0.034 mu m(-1)) and good thermal stability up to 250 degrees C. The diffusion lengths of photo-generated acid in the resist films were studied for various fractions of the basic monomer in the copolymers. The results show that the copolymer with a basic monomer can control acid diffusion. 0.25 mu m line/space patterns were obtained for this resist system using a KrF excimer laser stepper. The pattern profile was not deformed and T-top was not observed after 2 h post-exposure delay. The polymer has etch resistance comparable to the novolac resist under CHF3 plasma
Going Beyond Counting First Authors in Author Co-citation Analysis
Full text linkThe present study examines one of the fundamental aspects of author co-citation analysis (ACA) - the way co-citation
counts are defined. Co-citation counting provides the data on which all subsequent statistical analyses and mappings
are based, and we compare ACA results based on two different types of co-citation counting - the traditional type that
only counts the first one among a cited work's authors on the one hand and a non-traditional type that takes into
account the first 5 authors of a cited work on the other hand. Results indicate that the picture produced through this non-traditional author co-citation counting contains more coherent author groups and is therefore considerably clearer. However, this picture represents fewer specialties in the research field being studied than that produced through the traditional first-author co-citation counting when the same number of top-ranked authors is selected and analyzed. Reasons for these effects are discussed
Variations on the Author
Full text link“Variations on the Author” discusses two of Eduardo Coutinho’s recent films (Um Dia na Vida, from 2010, and Últimas Conversas, posthumously released in 2015) and their contribution to the general question of documentary authorship. The director’s filmography is characterized by a consistent yet self-effacing form of authorial self-inscription: Coutinho often features as an interviewer that rather than express opinions propels discourses; an interviewer that is good at listening. This mode of self-inscription characterizes him as an author who is not expressive but who is nonetheless markedly present on the screen. In Um Dia na Vida, however, Coutinho is completely absent form the image, while Últimas Conversas, on the contrary, includes a confessional prologue that moves the director from the margins to the center of his films. This article examines the ways in which these works stand out in the filmography of a director who offers new insights into the notion of cinematic authorship
Appropriate Similarity Measures for Author Cocitation Analysis
Full text linkWe provide a number of new insights into the methodological discussion about author cocitation analysis. We first argue that the use of the Pearson correlation for measuring the similarity between authors’ cocitation profiles is not very satisfactory. We then discuss what kind of similarity measures may be used as an alternative to the Pearson correlation. We consider three similarity measures in particular. One is the well-known cosine. The other two similarity measures have not been used before in the bibliometric literature. Finally, we show by means of an example that our findings have a high practical relevance.information science;Pearson correlation;cosine;similarity measure;author cocitation analysis
Dispelling the Myths Behind First-author Citation Counts
Full text linkWe conducted a full-scale evaluative citation analysis study of scholars in the XML research field to explore just how different from each other author rankings resulting from different citation counting methods actually are, and to demonstrate the capability of emerging data and tools on the Web in supporting more realistic citation counting methods. Our results contest some common arguments for the continued
use of first-author citation counts in the evaluation of scholars, such as high correlations between author rankings by first-author citation counts and other citation
counting methods, and high costs of using more realistic citation counting methods that are not well-supported by the ISI databases. It is argued that increasingly available digital full text research papers make it possible for citation analysis studies to go beyond what the ISI databases have directly supported and to employ more
sophisticated methods
koamabayili/VECTRON-author-checklist: VECTRON author checklist
No full textWe have done our best to complete the author checklist relating to the use of animals in the hut study. Note that the objective for the hut study was to evaluate the IRS treatment applications for residual efficacy against Anopheles mosquitoes, including the local An. coluzzii mosquito population. Cows were only used to attract mosquitoes into the huts and no tests were carried out directly on the cows. The author checklist is intended for use with studies where experiments are carried out on animals, which is why we have had such difficulty in completing this for the hut study, as many of the questions do not relate to how the cows were used
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