1,720,969 research outputs found
Vertical Mirror Fabrication Combining KOH Etch and DRIE of (110) Silicon
No full textThis paper presents fabrication of MEMS-actuated optical-quality vertical mirrors as the key active optical components in a silicon optical bench (SOB) technology. The fabrication process is based on a combination of potassium hydroxide (KOH) etch and deep reactive ion etching (DRIE) of (110) SOI wafers. The process starts by creating optical-quality vertical surfaces by KOH etch, followed by an oxidation step to protect them. The patterned wafer is then etched by DRIE to define actuators. The process is designed to allow the KOH etch and DRIE to be independently optimized without compromising either while at the same time meeting the challenge of lithography on high-aspectratio structures. Three variations of the fabrication process are demonstrated, two that use double masking layers and one that uses a silicon masking layer. We demonstrate in-plane scanners and fast translational vertical mirrors fabricated using these processes. In addition, we propose extensions of the fabrication process to account for DRIE aspect-ratio limitations. Mask layouts of key SOB building blocks, including vertical mirrors, beam splitters, and parallel-plate actuators, are also presented. [2008-0146
Tunable bandwidth optical filter based on MEMS Gires-Tournois interferometer
Full text linkThis paper demonstrates an optical filter, in which the center wavelength and 3-dB bandwidth can be tuned using MEMS technology. The proposed device has a periodic characteristic in the spectral domain with a free spectral range (FSR) matching the channel spacing of DWDM system. This spectral periodicity makes this type of device suitable for colorless narrow bandpass filters. When combined with wavelength multiplexers/demultiplexers with the channel spacing equal to the FSR of the device, for example, this optical filter can be used in any ports to tune the center wavelength and the bandwidth of individual WDM channel. Continuous tuning of the center wavelength and the FSR for these devices have been demonstrated in earlier studies. In this paper, the focus is mainly on variable optical bandwidth. Compared to filters implemented in planar lightwave circuit, the reported device offer improved insertion loss, FSR, and speed of tuning
High-resolution, high-speed microscanner in single-crystalline silicon actuated by self-aligned dual-mode vertical electrostatic combdrive with capability for phased array operation
No full textWe present micromirrors actuated by self-aligned, high aspect ratio, vertical electrostatic combdrives with multi-level electrical isolation that allows bi-directional and dual-mode (independent rotation and piston motion) operation. The fabrication process is based on self-aligned DRIE of SOI wafers with two device layers. The two oxide layers provide electrode isolation and etch stops for thickness control. Only front-side processing is required. We demonstrate micromirrors of this type with ±9 degrees of optical scanning and 7.5 μm of piston motion under static actuation. Micromirrors designed for resonant scanning have optical scan angles up to ±25 degrees at 13.5 kHz
Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability
No full textWe present micromirrors actuated by self-aligned, high aspect ratio, vertical electrostatic combdrives with multi-level electrical isolation that allows bi-directional and dual-mode (independent rotation and piston motion) operation. The fabrication process, which requires only front-side processing, is based on self-aligned deep-reactive ion etching (DRIE) of silicon-on-insulator (SOI) wafers with two device layers. The two oxide layers between the device layers provide electrode isolation and etch stops for thickness control. Self-alignment of electrostatic combs in the two device layers is accomplished by creating masking features in the upper layer that are transferred into the lower layer. The masking features are typically removed, but in some cases they remain as an integral part of the completed device. SEM pictures show perfectly aligned vertical combteeth both with and without removal of the masking features. We demonstrate micromirrors of this type with +/-9degrees of optical scanning and 7.5 mum of piston motion under static actuation. Micromirrors designed for resonant scanning have optical scan angles up to +/-25degrees at 13.5 kHz. (C) 2003 Elsevier B.V. All rights reserved
Micro-optical phased arrays for spatial and spectral switching
No full textThis article describes two optical devices based on linear arrays of micromirrors. The first is a phased array of micromirrors that can be rotated as well as translated vertically to maintain coherence across the array. We demonstrate experimentally that such micromirrors are capable of high-diffraction-efficiency phased-array scanning of laser beams. The second device is a Gires-Tournois (1969) interferometer with a micromirror array that provides tunable phase modulation for the multitude of partially reflected beams within the interferometer. We demonstrate experimentally that the MEMS-GT interferometer can operate as a tunable deinterleaver for dense wavelength-division multiplexed fiber optic communication
Going Beyond Counting First Authors in Author Co-citation Analysis
Full text linkThe present study examines one of the fundamental aspects of author co-citation analysis (ACA) - the way co-citation
counts are defined. Co-citation counting provides the data on which all subsequent statistical analyses and mappings
are based, and we compare ACA results based on two different types of co-citation counting - the traditional type that
only counts the first one among a cited work's authors on the one hand and a non-traditional type that takes into
account the first 5 authors of a cited work on the other hand. Results indicate that the picture produced through this non-traditional author co-citation counting contains more coherent author groups and is therefore considerably clearer. However, this picture represents fewer specialties in the research field being studied than that produced through the traditional first-author co-citation counting when the same number of top-ranked authors is selected and analyzed. Reasons for these effects are discussed
Variations on the Author
Full text link“Variations on the Author” discusses two of Eduardo Coutinho’s recent films (Um Dia na Vida, from 2010, and Últimas Conversas, posthumously released in 2015) and their contribution to the general question of documentary authorship. The director’s filmography is characterized by a consistent yet self-effacing form of authorial self-inscription: Coutinho often features as an interviewer that rather than express opinions propels discourses; an interviewer that is good at listening. This mode of self-inscription characterizes him as an author who is not expressive but who is nonetheless markedly present on the screen. In Um Dia na Vida, however, Coutinho is completely absent form the image, while Últimas Conversas, on the contrary, includes a confessional prologue that moves the director from the margins to the center of his films. This article examines the ways in which these works stand out in the filmography of a director who offers new insights into the notion of cinematic authorship
Appropriate Similarity Measures for Author Cocitation Analysis
Full text linkWe provide a number of new insights into the methodological discussion about author cocitation analysis. We first argue that the use of the Pearson correlation for measuring the similarity between authors’ cocitation profiles is not very satisfactory. We then discuss what kind of similarity measures may be used as an alternative to the Pearson correlation. We consider three similarity measures in particular. One is the well-known cosine. The other two similarity measures have not been used before in the bibliometric literature. Finally, we show by means of an example that our findings have a high practical relevance.information science;Pearson correlation;cosine;similarity measure;author cocitation analysis
High-resolution microelectromechanical scanners for miniaturized dual-axes confocal microscopes
No full textIn this paper we present scanning micromirrors, actuated by self-aligned, bidirectional, vertical electrostatic combdrives, for dual-axes confocal microscopy. The fabrication process, which is based on Deep Reactive Ion Etching (DRIE) of Silicon-on-insulator (SOI) wafers with two silicon device layers, requires only three lithography steps for one-dimensional scanners, while an additional two lithography steps must be performed to create two-dimensional scanners. Only front side processing is required and the two oxide layers of the double SOI wafers provide efficient and reliable etch stops. These features combined with the fact that the combs are self aligned, enable high-speed, high-resolution microscanners with stable and reliable operation as required for endoscopic implementations of confocal microscopes
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