195 research outputs found

    Organometallic vapor-phase epitaxy: theory and practice

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    Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and th

    Thermodynamic aspects of organometallic VPE

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    journal articleOrganometallic vapor phase epitaxy (OMVPE) is a new crystal growth technique which is rapidly gaining popularity due to its simplicity, flexibility and proven ability to grow excellent quality III/V compounds and alloys for device applications

    Compositional ordering in semiconductor alloys

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    journal articleCompositional ordering has been observed in a wide variety of III/V semiconductor alloys as well as in SiGe alloys. The thermodynamic driving force is now understood in terms of minimization of the microscopic strain energy of the bonds in the solid. However, the mechanism leading to the specific ordered structures formed is only now beginning to be understood

    InAsSbBi alloys grown by organometallic vapor-phase epitaxy

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    journal articleProvides information on a study on the growth of InAsSbBi alloys by organometallic vapor-phase epitaxy. Experiment; Results and discussion; Conclusion

    Overview of the OMVPE Process

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    Source Molecules

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    Thermodynamics

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    Order and surface processes in III-V semiconductor alloys

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    journal articleSemiconductor alloys have become increasingly useful during the last four decades because, through the use of alloys, the properties of semiconductors can be tailored by varying the composition to precisely match the requirements for specific electronic and photonic devices

    Organometallic Vapor-Phase Epitaxy: theory and practice

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    This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices.Key Features* Updated wi

    Devices

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