Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences
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High resolution patterning on AgInSbTe thin films by laser thermal lithography
No full textFabrication of high-resolution micro-structures is essential for DOEs and MEMS and has attracted increasing attention. In this study, several high-resolution micro-structures have been fabricated on AgInSbTe phase-change films by laser thermal lithography, and the minimum linewidth of these structures is about 200 nm, which is smaller than the size of the focused spot. The results indicate that laser thermal lithography is a simple and effective technique for the fabrication of micro-structures on AgInSbTe phase-change thin films
石英玻璃金属化过程中若干问题的探索
No full text由于膜层与石英玻璃性能的差异,在石英玻璃金属化过程中出现诸如膜层结合强度低、膜层与焊料润湿性不好及膜层应力较大导致膜层针孔起皮等问题;针对具体问题,结合实际情况,对如上问题进行了一系列探索,采取不同措施,解决实际中的问题
基于线性规划的光刻机光源优化方法
No full text光刻技术是极大规模集成电路制造的关键技术之一。光刻分辨率决定集成电路芯片的特征尺寸。在曝光波长与数值孔径一定的情况下,需通过改善光刻工艺和采用分辨率增强技术减小工艺因子,提高光刻分辨率。光源优化(Source Optimization,SO)技术是一种重要的分辨率增强技术。由于不需要重新制造掩模,SO具有成本低、实现速度快的优点。自离轴照明技术发明以来,已有不少学者对SO进行了研究。近来,Flex Ray等自
轴锥镜锥角检测方法研究
No full text1.引言轴锥镜是一种旋转对称角锥形光学元件,由于它长的焦深以及窄的横向宽度,被广泛应用于成像光学系统、激光束整形等方面。在投影光刻机中,轴锥镜可以将传统照明模式转换成环形照明模式,是其照明系统的核心元器件之一,加工过程中需要精确地检测其锥角大小。本文提出了一种利用自准直电子经纬仪检测轴锥镜锥角大小的方法,此方法操作简单、可检测任意锥角,且可以给出锥角大小的分布
2016 Joint Applied Optics and Chinese Optics Letters Feature Introduction: Digital Holography and 3D Imaging
No full textThis feature issue is the second Joint Applied Optics (AO) and Chinese Optics Letters (COL) Feature Issue on digital holography and three-dimensional (3D) imaging. The first installment of such a joint feature issue was in 2011. In the present feature issue, there are a total of 24 papers in AO and 9 papers in COL
Anisotropic edge enhancement in optical scanning holography with spiral phase filtering
No full textNational Natural Science Foundation of China [61405214]; Science Foundation of the Shanghai Municipal Commission of Science and Technology [14ZR1445300]Anisotropic edge enhancement is simulated using a spiral phase plate (SPP) in optical scanning holography (OSH). We propose to use a delta function and an SPP as the pupil functions to realize anisotropic edge enhancement. The interference of these two pupils is used to two-dimensionally scan an object to record its edge-only information. This is done in three ways: first, by shifting the SPP, second, by using two offset SPPs of same charge, and finally, by using two oppositely charged SPPs. Our computer simulations show the capability of selectively enhancing the edges of a given object
Application of Hybrid Iterative Algorithm in TIE Phase Retrieval with Large Defocusing Distance
No full text研究了一种基于强度传输方程(TIE)和角谱迭代传播算法的混合迭代算法。通过仿真和实验,对比了TIE算法与混合迭代算法在不同离焦距离下的相位恢复效果。结果表明,与TIE算法相比,混合迭代算法提升了大离焦距离下的相位恢复精度,同时提高了相位恢复的空间分辨率。该算法为高精度相位恢复提供了解决方案。国家科技重大专项; 国家国际科技合作专项; 上海市科技人才计划项目A hybrid iterative algorithm which combines the transport of intensity equation (TIE)with the iterative angular spectrum propagation algorithm is studied.In the simulations and experiments,the phase retrieval performances by the TIE algorithm and the hybrid iterative algorithm at different defocusing distances are compared. The results indicate that,if compared with those by the TIE algorithm,the accuracy at large defocusing distance and spatial resolution of the phase retrieval by the hybrid iterative algorithm are improved.This algorithm provides a solution to the phase retrieval with high accuracy
Development of Device for High-Precision Deep Ultraviolet Optical Transmittance Measurement
No full text为了精确控制曝光剂量,需要精确测量光刻系统的光学透射率。采用了双光路对比的方法进行透射率测量,有效地消除了准分子激光器能量波动带来的透射率测量误差。并通过加入起偏器,消除了准分子激光器偏振态不稳定带来的误差。搭建了深紫外光学透射率测量装置,对1片可计算透射率的光学样品进行透射率测量,其测量结果与透射率理论计算结果基本一致。测量结果显示,该装置的测量重复性可达到0.3%。通过分光光度计对该光学样品进行测量,通过结果对比,该装置的测量结果与分光光度计的测量结果相差0.28%。另外,该装置应用灵活,可以测量光学In order to accurately control the exposure dose, it is necessary to measure optical transmittance of lithography system accurately. A doublecontrast method of optical transmittance measurement is introduced. It effectively eliminates the measurement error caused by an excimer laser energy fluctuation. In order to eliminate the measurement errors caused by diversification of excimer laser polarization, a polarizer is used in this equipment. The experimental setup is designed to measure the transmittance of an optical sample whose transmittance can be calculated accurately. The experimental results show that measurement results are consistent with theoretical calculations and the repeatability of measurement is less than 0.3%. The transmittance of optical sample is measured by the spectrophotometer, and the difference between the two kinds of equipment is 0.28%. Furthermore, the equipment has flexible application for transmittance measurement of optical system and advantage for not influenced by optical sample sizes
Nonsubsampled contourlet transform method for optical fringe pattern analysis in profilometry and interferometry
No full textNational Natural Science Foundation of China (NSFC) [61205102, 61275207, 61474129, 61405210]A method based on a nonsubsampled contourlet transform, which is an overcomplete transform with multiresolution, directionality, and shift-invariance properties, is proposed to extract the fundamental frequency component of an optical fringe pattern in profilometry and interferometry. The nonsubsampled contourlet transform method overcomes the disadvantages of the original contourlet transform method, which lacks the shift-invariance property. Besides, it improves the frequency selectivity. A strategy is developed to automatically determine the optimal decomposition scale for removing the background intensity and suppressing the noise of the fringe pattern. The proposed method is precise, effective, and possesses a strong noise immune ability. Simulations and experiments verify the validity, and show the superiorities of the proposed method. (C) 2016 Optical Society of Americ
A Stable 200TW/1Hz Ti:sapphire laser for driving full coherent XFEL
No full textNational Basic Research Program of China [2011CB808101]; Chinese Academy of Science; National Natural Science Foundation of China (NSFC) [11127901, 10734080, 61221064, 60908008, 61078037]Basic features of the ultra-short Ti:sapphire laser for driving compact X-ray free electron laser (XFEL) seeded by laser-driven high harmonic generation (HHG) at SIOM (Shanghai, China) is presented. The laser system consists of four-stage Ti:sapphire amplifiers and can produce 8 J energy at 1 Hz repetition rate after the final power amplifier. The best shot-to-shot energy fluctuation is as low as 0.54% in rms value, which is a desirable characteristic for driving stable electron acceleration and HHG seed. After compression, maximal pulse energy of 5.6 J and pulse duration of 27 fs can be obtained, the corresponding pulse peak power is above 200 TW. To achieve full coherent XFEL, the amplified chirped laser beam is split into two beams after the final power amplifier. After compression in two independent compressors, the two laser beams can be used to drive laser wakefield acceleration (LWFA) and HHG respectively. The benefit of such a scheme is to improve the timing jitter and achieve all-optical synchronization between the electron beam and HHG seed in the near future. (C) 2015 Elsevier Ltd. All rights reserved