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    The Nanolithography Toolbox

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    This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolithography Toolbox to help users of the CNST NanoFab design devices with complex curves and aggressive critical dimensions. Using parameterized shapes as building blocks, the Nanolithography Toolbox allows users to rapidly design and layout nanoscale devices of arbitrary complexity through scripting and programming. The Toolbox offers many parameterized shapes, including structure libraries for micro- and nanoelectromechanical systems (MEMS and NEMS) and nanophotonic devices. Furthermore, the Toolbox allows users to precisely define the number of vertices for each shape or create vectorized shapes using Bezier curves. Parameterized control allows users to design smooth curves with complex shapes. The Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices

    Methods and Tools for Performance Assurance of Smart Manufacturing Systems

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    The emerging concept of smart manufacturing systems is defined in part by the introduction of new technologies that are promoting rapid and widespread information flow within the manufacturing system and surrounding its control. These systems can deliver unprecedented awareness, agility, productivity, and resilience within the production process by exploiting the ever-increasing availability of real-time manufacturing data. Optimized collection and analysis of this voluminous data to guide decision-making is, however, a complex and dynamic process. To establish and maintain confidence that smart manufacturing systems function as intended, performance assurance measures will be vital. The activities for performance assurance span manufacturing system design, operation, performance assessment, evaluation, analysis, decision making, and control. Changes may be needed for traditional approaches in these activities to address smart manufacturing systems. This paper reviews the current methods and tools used for establishing and maintaining required system performance. It then identifies trends in data and information systems, integration, performance measurement, analysis, and performance improvement that will be vital for assured performance of smart manufacturing systems. Finally, we analyze how those trends apply to the methods studied and propose future research for assessing and improving manufacturing performance in the uncertain, multi-objective operating environment. Editor’s Note: This paper was originally published as NISTIR 8099, Methods and Tools for Performance Assurance of Smart Manufacturing Systems, December 2015 (http://dx.doi.org/10.6028/NIST.IR.8099). All of the content from the original publication remains the same, except removal of the Table of Contents, additions to the reference list, and minor editorial changes

    Robert R. Greenberg

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    ROBERT R. GREENBERG NBS/NIST: 1976-2008 INDUCTED: 2016 Birth: 21 May 1949, Brooklyn, New York EDUCATION: Brooklyn College (CUNY), BS (Chemistry), 1971 University of Maryland, PhD (Chemistry), 1976 CITATION: For exceptional contributions to the field of radioanalytical metrology, instrumental and radiochemical activation analysis, and gamma-ray spectrometry, leading to unprecedented accuracy and precision for elemental determinations. POSITIONS HELD AT NBS/NIST: Research Chemist, Inorganic Analytical Research Division, National Measurement Laboratory, 1976-1989 Group/Team Leader, Nuclear Methods Group/Team, Analytical Chemistry Division, Chemical Science and Technology Laboratory, 1989-2007 Scientist Emeritus, Chemical Sciences Division, Materials Measurement Laboratory, 2008-present HONORS: Fellow, American Nuclear Society (1998) CSTL Technical Achievement Award (2000) NIST Judson C. French Award (2003) NIST Bronze Medal (2007) George Hevesy Medal A ward (2007) MEMBERSHIPS: National Academy of Sciences Committee on Scientific Assessment of Compositional Analysis of Bullet Lead American Nuclear Society Biology and Medicine Division American Nuclear Society Isotopes and Radiation Division International Committee on Activation Analysis PUBLICATIONS: More than 100 publications including: Greenberg, R.R, "Trace Element Characterization of the NBS Urban Particulate Matter Standard Reference Material by Instrumental Neutron Activation Analysis," Anal. Chem. 51, 2004-6 (1979) Greenberg, R.R., "Elemental Characterization of the National Bureau of Standards Milk Powder Standard Reference Material by Instrumental and Radiochemical Neutron Activation Analysis," Anal. Chem. 58, 2511- 16 (1986) Greenberg, R.R. and Carpenter, B.S., "High Accuracy Determination ofU-235 in Nondestructive Assay Standards by Gamma Spectrometry," J. Radioanal. Nucl. Chem. 111, 177-97 (1987) Greenberg, R.R., Lindstrom, R.M. and Simons, D.S., "Instrumental Neutron Activation Analysis for Certification oflon-Implanted Arsenic in Silicon," J. Radioanal. Nucl. Chem. 245, 57-63 (2000) Greenberg, R.R., "Pushing The Limits ofNAA: Accuracy, Uncertainty and Detection Limits," J. Radioanal. Nucl. Chem. 278, 231-40 (2008) Greenberg, R.R., Bode, P. and Fernandes, E.A., "Neutron Activation Analysis - A Primary Method of Measurement," Spectrochimica Acta Part B, 66, 193-241 (2011

    Jobs and Research-Related Outcomes from the NIST-ARRA Construction Grants

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    In 2009 and 2010, NIST’s Construction Grant Program (NCGP) issued grants to 15 universities and 1 nonprofit institution to construct new or expand existing research facilities. Using 180millionprovidedbytheAmericanRecoveryandReinvestmentAct(ARRA)andanadditional180 million provided by the American Recovery and Reinvestment Act (ARRA) and an additional 221 million provided by awardees, these grants led to the construction of 87,991 square meters (947,000 square feet) of academic research and development (R&D) space. This amounted to approximately 10 % of all R&D space constructed by U.S. academic institutions during the same period. This paper summarizes these 16 construction grants and highlights the number of additional research grants, patents, publications, and other benefits that resulted from the use of these facilities, six years after ARRA was signed into law

    Bert M. Coursey

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    BERT M. COURSEY NBS/NIST: 1972-2011 INDUCTED: 2016 Birth: 27 March 1942, Birmingham, Alabama EDUCATION: University of Georgia, BS (Chemistry), 1965 University of Georgia, PhD (Physical Chemistry), 1970 CITATION: For pioneering technical advances in measurement of ionizing radiation in the environmental and medical sciences, and for leadership in establishing a national standards infrastructure for homeland security. POSITIONS HELD AT NBS/NIST: Research Chemist, Radioactivity Group, Ionizing Radiation Division, Center for Radiation Research, 1972-1987 Visiting Scientist, Central Bureau of Nuclear Measurements of the European Community in Belgium, 1983-1984 Program Analyst, Program Office & Office of Malcolm Baldrige National Quality Award, 1987-1988 Group Leader, Radiation Interactions and Dosimetry Group, Physics Laboratory, 1988-1994 Chief, Ionizing Radiation Division, Physics Laboratory, 1994-2003 Seconded from NIST to Department of Homeland Security (DHS), Director of Office of Standards & DHS Standards Executive, 2004-2011 Guest Researcher, Standards Coordination Office, Associate Director for Laboratory Programs, 2012-Present HONORS: NIST Bronze Medal (1986) U.S. Department of Commerce Silver Medal (1997) and Gold Medal (2002) NIST Allen V. Astin Measurement Science Award (2002) Samuel J. Heyman Service to America Medals (SAMMIE) Finalist (Science & Environment) (2003) R.J. Painter Award of ASTM and Standards Engineering Society (2005) Randall S. Caswell Award of the Council on Ionizing Radiation Measurements and Standards (2007) NIST Edward Bennett Rosa Award (2008) Fellow, American Association of Physicists in Medicine, Standards Engineering Society Sigma Xi MEMBERSHIPS: American Chemical Society, AOAC, ICRM, ANSI Homeland Security Standards Panel White House Transition Planning Team, Office of Homeland Security (precursor to DHS) Co-chair, White House OSTP/NSTC/CHNS Subcommittee on CBRNE Standards (2008-2011) PUBLICATIONS: More than 95 publications including: Coursey, B.M., Hutchinson, J.M.R., Lucas, L.L., Mann, W.B., Matsumura, T., Noyce, J.R., "NBS Standards for Environmental Radioactivity Measurements," J Radioanal. Chem 43,451 (1978) Coursey, B.M., Mann, W.B., Grau Malonda, A., Garcia-Torano, E., Los Arcos, J.M., Gibson, J.A.B. and Reher, D., "Standardization of Carbon-14 by 4n/3 Liquid-Scintillation Efficiency Tracing with Hydrogen-3," Int. J Appl. Radial. Isotopes 37,403 (1986) Desrosiers, M.F., Coursey, B.M., Parks, N.J., Avila, M.J., "Radiopharmaceutical Dose Assessment," Nature 349, 287 (1991) Coursey, B.M., Schima, F.J., Golas, D.B., Palabrica, O.T., Suzuki, A., and Dell, M.A., "Measurement Standards for Strontium-89 for Use in Bone Palliation," Int. J. Appl. Radial. Isotopes 49, 335 (1998) Coursey, B.M., "Opportunities for Scientists to Influence Policy: When Does Radiation Metrology Matter in Development of National Policy?," Int. J. Appl. Radial. Isotopes 87, 142 (2014

    The 2016 Revision of ISO 1 -- Standard Reference Temperature for the Specification of Geometrical and Dimensional Properties

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    This paper discusses the changes in the 2016 (third edition) of International Standard ISO 1. While the value of the standard reference temperature remains unchanged at 20 °C, the important definitions for the “reference temperature” and “standard reference temperature,” absent in prior editions, are now defined, with the latter exclusively reserved for the assignment of the internationally agreed upon temperature of 20 °C. The scope of the revised Standard has been carefully refined and made more explicit. This, together with other clarifications and improvements, has eliminated the ambiguities associated with specifications at non-standard reference temperatures and allows, if needed, different reference temperatures to be associated with different properties of a workpiece. The relationship between ISO 1 and dimensional measurements is also discussed and clarified. In this paper, we discuss the motivation for these changes and present several issues debated during the revision process for the benefit of future standards committees that might study this topic

    Phase Analysis of Portland Cement by Combined Quantitative X-Ray Powder Diffraction and Scanning Electron Microscopy

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    X-ray powder diffraction (XRD) has been used for several decades to identify and measure the mass fractions of various crystalline phases in portland cement. More recently, a combination of scanning electron microscopy with X-ray microanalysis (SEM/XMA) and image processing has been shown to enable the quantitative characterization of microstructural features in these materials. Eachtechnique can furnish some information that is not accessible from the other. For example, SEM/XMA can identify the microstructural location and morphology of calcium sulfate minerals, while only XRD can determine the relative abundance of the different forms ofcalcium sulfate, such as gypsum (CaSO4 · 2H2O), bassanite (CaSO4 ·12H2O), and anhydrite (CaSO4). This document describes how XRD and SEM/XMA can be used together to establish and validate the portland cement phase composition and microstructure.Particular emphasis is laid on step-by-step procedures and best practices for XRD specimen preparation, data collection, and intepretation. Similar detail has been given recently for SEM/XMA [Stutzman et al., NIST Tech Note 1877, U.S. Department ofCommerce, April 2015]. The methods are demonstrated for three portland cement powders, through which apparent discrepanciesbetween the results of the two methods are identified and procedures are described for resolving the discrepancies and quantifying uncertainty

    (Audio) Oral history interview of Joan R. Rosenblatt, March 31, 2016/ [persons present]: Bill Gadzuk, Jim Filliben, Hans Oser, Ron Boisvert, Jeffrey Fong (via phone), Barbara Uglik (via written word), Kristen Frederick-Frost.

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    Dr. Joan Rosenblatt had a distinguished career at NBS as a mathematician/statistician, chief of Statistical Engineering in the Center for Applied Math, and Director of the Computing and Applied Math Lab

    Fabrication Process for an Optomechanical Transducer Platform with Integrated Actuation

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    This article reports a process for batch fabrication of a fiber pigtailed optomechanical transducer platform with overhanging. The platform enables a new class of high bandwidth, high sensitivity, and highly integrated sensors that are, compact, robust, and small, with the potential potential for low cost batch fabrication inherent in Micro-Opto-Electro-Mechanical-Systems technology. This article provides a guide to the whole fabrication process and explains critical steps and process choices in detail. Possible alternative fabrication techniques and problems are discussed. The fabrication process consists of electron beam lithography, i-line stepper lithography, and back-and frontside mask aligner lithography. The goal of this article is to provide a comprehensive description of the fabrication process, presenting context and details which are highly relevant to the rational implementation and reliable repetition of the process. Moreover, this process makes use of equipment commonly found in nanofabrication facilities and research laboratories, facilitating the broad adaptation and application of the process. Therefore, while this article specifically informs users of the Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST), we anticipate that this information will be generally useful for the nano-and microfabrication research communities at large

    Katharine B. Gebbie

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    KATHARINE B. GEBBIE NBS/NIST: 1968-2016 INDUCTED: 2016 Birth: 4 July 1932, Cambridge, Massachusetts Death: 17 August 2016 EDUCATION: Bryn Mawr College, BA (Physics), 1957 University College London, BSc (Astronomy), 1960 University College London, PhD (Physics), 1964 CITATION: For outstanding leadership of NBS/NIST and its physics program which led to four Nobel Prizes and several other prestigious awards and recognitions for NBS/NIST staff. POSITIONS HELD AT NBS/NIST: Physicist, Quantum Physics Division, Center for Absolute Physical Quantities, National Measurement Laboratory (NML), 1968-1985 Chief, Quantum Physics Division, Center for Absolute Physical Quantities, NML, 1985-1990 Acting Director, Center for Basic Standards, 1988-1990 Director, Center for Atomic, Molecular, and Optical Physics, Physics Laboratory, 1990-1991 Director, Physics Laboratory, 1991-2011 Director, Physical Measurement Laboratory, 2011-2012 Senior Scientific Advisor to the Director, 2012-2016 HONORS: U.S. Department of Commerce Gold Medal (1990 and 2002) NIST Equal Employment Opportunity Award (1993) Fellow, American Physical Society (1994) Women in Science and Engineering Lifetime Achievement A ward ( 1994) Service to America Medal (2002) Fellow, American Association for the Advancement of Science (2005) Distinguished Presidential Rank Award, U. S. Senior Executive Service (2006) Fellow, American Academy of Arts and Sciences (2008) Namesake of the Katharine B. Gebbie Young Investigator Award, NIST Chapter of Sigma Xi (2015) Namesake of the NIST Katharine Blodgett Gebbie Laboratory Building, Boulder, CO (2015) MEMBERSHIPS: American Academy of Arts and Sciences American Association for the Advancement of Science American Physical Society PUBLICATIONS: More than 40 publications including: Gebbie, K.B. and Seaton, M.J., "Central Stars of Planetary Nebulae," Nature l 99, 580 (1963) Gebbie, K.B., "Model Atmospheres for Central Stars of Planetary Nebulae," M.N.R.A.S. 135, 181 (1967) Gebbie, K.B. and Thomas, R.N., (Editors), "Wolf-Rayet Stars," U.S. Government Printing Office (1968) Gebbie, K.B. and Steinitz, R., "On Spatial Variations in the Intensity of Chromospheric Ha," Astrophysical Journal 188,399 (1974) Gebbie, K.B., "Turning Women into Leaders," Physics World 15, 17 (2002

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