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Modified Reactive Sputter Deposition of Titanium Nitride Thin Films via HIPIMS with Kick-Pulse and Improvement of the Structure-Zone Model
Direct current (DC) and radio frequency (RF) sputtering methods have been commonplace in industry for several decades and widely studied in literature. Hard films of nitrides, such as titanium nitride (TiN), have been deposited using reactive DC sputtering onto cutting tools and medical devices extensively as well. For these applications, the films require excellent adhesion, high density, and high hardness. High-Power Impulse Magnetron Sputtering (HIPIMS) has emerged over the last several years as a method to produce films with increased density and mechanical properties. Process-structure-property relationships for reactive HIPIMS are not yet well developed. Additionally, conventional HIPIMS suffers from relatively low deposition rates, which becomes a challenge or barrier of adoption for applied TiN coatings that are typically greater than several microns in thickness. This work aims to look at increasing this deposition rate while maintaining the beneficial effects of HIPIMS by utilizing the short duration “kick-pulse” in the voltage/current cycle, leading to higher instantaneous deposition rates and increased adatom energy level. TiN films are deposited onto silicon (Si) wafers under varied reactive sputtering conditions, including DC, HIPIMS, and HIPIMS with kick-pulse. Structural characterizations are performed using scanning electron microscopy (SEM) and X-ray diffraction (XRD). Optical properties of the resulting films are also characterized using reflection UV-Vis spectroscopy. The deposition rate, morphology, and chemical composition of the films are highly affected by the processing conditions, with the kick-pulse producing significant increase in deposition rate and observed grain size. Further investigation will aim to develop a modified structural zone model to include HIPIMS with and without kick-pulse
Workers at Clara White Mission
Photograph: Unidentified workers, Clara White Mission, 613 West Ashley Street, Jacksonville, Florida. Undated.https://digitalcommons.unf.edu/eartha_images/1643/thumbnail.jp
WPA Sewing Room, Clara White Mission
Photograph: Unidentified women, WPA sewing room at the Clara White Mission, 613 West Ashley Street, Jacksonville, Florida. More than one hundred women were given regular employment through this project. Mrs. Martha Green, supervisor. Stamped on front: Weems Studio 512 W. Ashley Street Jacksonville Florida. Undated.https://digitalcommons.unf.edu/eartha_images/1670/thumbnail.jp
Florida Normal and Industrial Institute Campus
Photograph: Scene of the campus and buildings of the Florida Normal and Industrial Institute. On reverse: Girls\u27 Dormitory (Rear view) Florida Normal and Industrial Institute St. Augustine Florida. One of eight scenes of the campus and buildings of the Florida Normal and Industrial Institute Undated.https://digitalcommons.unf.edu/eartha_images/1359/thumbnail.jp
Dr. D.W. Roberts
Photograph: Portrait of Dr. D. W. Roberts, deceased August 1919. St. Augustine, Florida. Name printed and signed on front. Undated.https://digitalcommons.unf.edu/eartha_images/1395/thumbnail.jp
Robert Williams
Photograph: Portrait of Robert Williams, ex-slave, ninety-five years old sitting a chair. Handwritten notes on reverse. Undated.https://digitalcommons.unf.edu/eartha_images/1391/thumbnail.jp
Richard R. Ponce
Photograph: Portrait of Richard R. Ponce. On reverse: Compliments of Richard R. Ponce. On front: Davis Gallery, E.W. Jackson, Manager 13 1/2 West Bay Street Jacksonville, Fla. Undated.https://digitalcommons.unf.edu/eartha_images/1379/thumbnail.jp
Bethel Baptist Church Tallahassee Florida
Photograph: Bethel Baptist Church of Tallahassee, Florida. (new church)https://digitalcommons.unf.edu/eartha_images/1376/thumbnail.jp
Group, Unidentified Event
Photograph: Erskine Tucker; Joseph Debore; Elvin Hunter; Joseph Thayer; William Geiger; James Williams; Daniel Akers; James Wooden; Alphonso Wheatbrook. On reverse: 1at row: Thayer, Joseph; Geiger, William; Williams, James; Akers, Daniel; Wooden, James; Wheatbrook, Alphonso. 2nd row: Tucker, Eskine; next man unknown, Debore, Joseph; Hunter, Edwin; next man unknown. Undated.https://digitalcommons.unf.edu/eartha_images/1390/thumbnail.jp
Mrs. Francis Lewis Admiring Cactus
Photograph: Snapshot of travels of Mrs. Francis Lewis. Handwritten on reverse: admiring [my] blooming cactus. Undated.https://digitalcommons.unf.edu/eartha_images/1449/thumbnail.jp