1,721,222 research outputs found
Self-aligned double patterning process for subtractive Ge Fin fabrication at 45-nm pitch
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Nanobeam diffraction strain analysis of released Ge gate-all-around nano-wires: challenges and limitations
No full textNano-beam diffraction investigation of the strain evolution in SiGe channel pFETs with gate first or gate last process
No full textEB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment
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