1,720,966 research outputs found
Modelling and extended characterization of sensitive optical micro-machined ultrasound sensors (OMUS) based on a silicon photonic ring resonator on an acoustical membrane
No full textOptical micro-machined ultrasound sensors with a silicon photonic resonator in a buckled acoustical membrane
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Design, fabrication and first testing of a novel opto-mechanical ultrasound sensor in silicon photonics
No full textDesign, fabrication and testing of an opto-mechanical ultrasound sensor based on a sensitive silicon photonic waveguide
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Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics
No full textUltrasonography1 and photoacoustic2,3 (optoacoustic) tomography have recently seen great advances in hardware and algorithms. However, current high-end systems still use a matrix of piezoelectric sensor elements, and new applications require sensors with high sensitivity, broadband detection, small size and scalability to a fine-pitch matrix. This work demonstrates an ultrasound sensor in silicon photonic technology with extreme sensitivity owing to an innovative optomechanical waveguide. This waveguide has a tiny 15 nm air gap between two movable parts, which we fabricated using new CMOS-compatible processing. The 20 μm small sensor has a noise equivalent pressure below 1.3 mPa Hz−1/2 in the measured range of 3–30 MHz, dominated by acoustomechanical noise. This is two orders of magnitude better than for piezoelectric elements of an identical size4. The demonstrated sensor matrix with on-chip photonic multiplexing5–7 offers the prospect of miniaturized catheters that have sensor matrices interrogated using just a few optical fibres, unlike piezoelectric sensors that typically use an electrical connection for each element
Photoacoustic raster scan imaging using an optomechanical ultrasound sensor in silicon photonics
Full text linkPhotoacoustic tomography defines new challenges for ultrasound detection compared to ultrasonography. To address these challenges, a sensitive, small, scalable, and broadband optomechanical ultrasound sensor (OMUS) has been developed. The OMUS is an on-chip optical ultrasound sensor, using optical interferometric ultrasound detection. It consists of an acoustic membrane on top of an optical ring resonator that modulates the optical ring resonance with high efficiency enabled by an innovative optomechanical waveguide. Raster scanning photoacoustic tomography has been demonstrated with a single-element OMUS. Based on performance and form factor, the OMUS combined with passive optical multiplexing may enable new applications in photoacoustic imaging.Optical Technologie
Opto-Mechanical Ultrasound Sensor based on Sensitive Silicon-Photonic Split Rib-type Waveguide
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