1,720,998 research outputs found
Understanding adhesion failure in low-k dielectric stacks during chemical mechanical polishing
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Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse
No full textSilicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse
No full textConfined chemical cleaning: a novel concept evaluated for front end of line applications
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Interplay of plasma etch, strip and wet clean in patterning La2O3/HfO2-containing high-k metal gate stacks
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