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1,722,469 research outputs found

Semiconductor profiling with sub-nm resolution: Chalenges and solutions

Author: Vandervorst Wilfried
Publication venue
Publication date: 01/01/2008
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Near-surface and interfacial profiling of B: an (un)solvable problem with Sims?

Author: Vandervorst Wilfried
Publication venue
Publication date: 01/01/2002
Field of study

imec Publications (Interuniversity Microelectronics Centre)

The state-of-the art of semiconductor profiling

Author: Vandervorst Wilfried
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Imec : a centre of excellence enabling fundamental understanding of process and materials development

Author: Vandervorst Wilfried
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Metrology for nano-electronics: challenges and solutions

Author: Vandervorst Wilfried
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Metrology for nano-electronics: challenges and solutions

Author: Vandervorst Wilfried
Publication venue
Publication date: 01/01/2008
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Semiconductor profiling with sub-nm resolution: Chalenges and solutions

Author: Vandervorst Wilfried
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Materials characterization for deep submicron technology

Author: Vandervorst Wilfried
Publication venue
Publication date: 01/01/2002
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Secondary Ion Mass Spectrometry

Author: Vandervorst Wilfried
Publication venue
Publication date: 01/01/1994
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Basics, properties and limitations of SIMS in nanometer scale semiconductor technologies

Author: Vandervorst Wilfried
Publication venue
Publication date: 01/01/2005
Field of study

imec Publications (Interuniversity Microelectronics Centre)

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