1,721,017 research outputs found
A practical alternating PSM modeling and OPC approach to deal with 3D mask effects for the 65nm node and beyond
No full textImage imbalance compensation in alternating phase-shift masks towards the 45 node through-pitch imaging
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Evaluation of Lines and Spaces printing and general understanding of imaging with dark field low-n mask
No full textAccurate mapping of dose variations on EUV scanners using dose-to-clear exposures and optical ellipsometry
No full textMaterial influences on process performance in chemo-epitaxy directed self-assembly integration
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