1,720,977 research outputs found
A combined three-dimensional kinetic Monte Carlo and quantum chemistry study of the CVD of Si on Si(100) surfaces
No full textGas-phase and surface kinetics of epitaxial silicon carbide growth involving chlorine-containing species
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Multiscale simulation of thin films growth: a new paradigm for chemical reaction engineering
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Materials computation towards technological impact: the multiscale approach to thin films deposition
No full textMulti-hierachy design approach of a new MOCVD reactor for heteroepitaxial GaAs deposition on large scale Ge substrates for the manufacture of satellite-use solar cells
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