1,721,071 research outputs found
The use of in situ electrochemical measurements to predict corrosion issues during barrier CMP of 30 nm structures
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Investigation of percarbonate based slurry chemistry for controlling galvanic corrosion during CMP of ruthenium
No full textRole of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films
No full textInvestigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion
No full textEffect of Al2O3 and SiO2 Abrasives on the CMP of molybdenum using different polishing parameters
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