1,721,137 research outputs found
Sub-micron normal-insulator-superconductor tunnel junctions for sensitive thermometry and micro-refrigerators
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Return current in hysteretic Josephson junctions: Experimental distribution in the thermal activation regime
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Study of the Fabrication Process for a Dual Mass Tuning Fork Gyro
No full textThe fabrication process of a dual mass tuning for gyroscope presents many different challenges: the aspect ratio of the sidewalls, the Aspect Ratio Dependent Etch (ARDE) which causes different gaps to be etched in different etching time [1], the stiction during the release of the free structures, the notching effect that occurs with a dielectric etch stop layer [2], the thermal contact during the etch process. In this paper are presented different processes and studies of the etching characteristics in order to avoid or minimize these problems
Characteristics of superconductor-insulator-normal tunnel junctions for on-chip electronic refrigeration
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