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Operation of Lorentz-force MEMS magnetometers with a frequency offset between driving current and mechanical resonance
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SENSORE MAGNETICO INCLUDENTE UN TRASDUTTORE BASATO SULLA FORZA DI LORENTZ PILOTATO AD UNA FREQUENZA DIVERSA DALLA FREQUENZA DI RISONANZA, E METODO DI PILOTAGGIO DI UN TRASDUTTORE BASATO SULLA FORZA DI LORENTZ
No full textLa presente invenzione è relativa ad un sensore magnetico includente un trasduttore basato sulla forza di Lorentz, il quale viene pilotato ad una frequenza diversa dalla propria frequenza di risonanza. Inoltre, la presente invenzione si riferisce ad un metodo di pilotaggio di un trasduttore basato sulla forza di Lorentz
A Versatile Instrument for the Characterization of Capacitive Micro- and Nanoelectromechanical Systems
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Solving FSR Versus Offset-Drift Trade-Offs with Three-Axis Time-Switched FM MEMS Accelerometer
No full textThis paper describes the working principle, the design, and the characterization of a three-axis frequency-modulated MEMS accelerometer, in which the differential frequency readout is performed through a novel time-switched approach. The proposed methodology is based on a double sampling of the oscillation frequency of a single resonator, consecutively biased in two different configurations in time. This technique enables to avoid offset thermal drift contributions typical of differential resonant accelerometers based on two distinct resonators with unavoidable mismatch in the temperature coefficient of frequency (TCf). Alternatively, a residual TCf offset drift component can be tuned to counterbalance other drift sources (e.g., stress-related), allowing a complete cancellation of the zero-g-offset (ZGO) thermal drift. Experiments on various samples report repeatable sub- 50μ g/K thermal drift without post-acquisition corrections, with a full-scale higher than 32g at a 100μ g/√ Hz consumer-grade resolution. [2018-0089]
ACCELEROMETRIC SENSOR IN MEMS TECHNOLOGY HAVING HIGH ACCURACY AND LOW SENSITIVITY TO TEMPERATURE AND AGEING (SENSORE ACCELEROMETRICO REALIZZATO IN TECNOLOGIA MEMS AVENTE ELEVATA ACCURATEZZA E RIDOTTA SENSIBILITÀ NEI CONFRONTI DELLA TEMPERATURA E DELL'INVECCHIAMENTO)
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Mechanical and Electronic Amplitude-Limiting Techniques in a MEMS Resonant Accelerometer
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