1,721,068 research outputs found
Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers
No full textDevelopment of a comprehensive metrology software platform dedicated to block copolymers thin film nanopatterns
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Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patterns
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Enhancing etch contrast in DSA block copolymer films with sequential infiltration synthesis on 300mm Si substrates
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