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A pplication of soft landing to the process control of chemical mechanical polishing
No full textIn chemical mechanical polishing (CMP), a two-stage polishing strategy is often employed. A high removal
rate (RR) is set at the initial stage, then a lower RR is employed to remove residual metal and extended to the
over-polish stage. An analogy between the soft landing of a spacecraft and CMP operation is established and the
CMP operation can be viewed as a minimum-time optimal control problem. Measurement uncertainties prevent
direct implementation of bang-bang control law for the entire polishing process. Thus, a two-stage CMP
operation procedure is devised to ensure robust operation while maintaining a high throughput
Pithemera lanyuensis Shen & Tsai 2002
No full textPithemera lanyuensis Shen & Tsai, 2002 Pithemera lanyuensis Shen & Tsai 2002 a: 17, fig. 1 A; Blakemore et al. 2006: 230; Tsai et al. 2009: 38. Material examined. 1 adult, NCHUZOOL 13523, Basiandong, Changbin, Taitung Co., Taiwan, coll. H.-T. Shih et al., 30 Jan. 2007; 1 adult, NCHUZOOL 13531, 22°02’ 1.6 ”N, 121 ° 33 ’ 57.7 ”E, Yeyin, Lanyu, Taitung Co., Taiwan, Y.-H. Wang, 7 Jan. 2008; 2 adults, NCHUZOOL 13532, Kaiyuan Harbor Lighthouse, Lanyu, Taitung Co., Taiwan, Y.-H. Wang, 2 Apr. 2008; 2 adults, NCHUZOOL 13533, Yeyou S. River (= R.), Lanyu, Taitung Co., Taiwan, Y.-H. Wang, 8 Jan. 2008; 5 adults, NCHUZOOL 13534, 22°03’ 22.5 ”N, 121 ° 30 ’ 3.2 ”E, Kaiyuan Harbor Lighthouse, Lanyu, Taitung Co., Taiwan, Y.-H. Wang, 6 Jan. 2008. Diagnosis. Dimensions 29–45 mm, 2.0– 2.7 mm in x, 1.9–2.5 mm in xxx, 2.1–2.9 mm in clitellum. Segments 81–93. Prostomium, epilobic; first dorsal pore at 12 / 13. Clitellum annular, xiv–xvi 1 / 2. Spermathecal pores at 4 / 5–8 / 9; male pores on xviii, genital markings on xix–xx; female pores, paired on xiv; 8–13 setae between male pores, setae in clitellum in xiv and xv. Septa, 8 / 9 absent; 9 / 10–12 / 13 thick. Gizzard in ix; intestinal origin from xiv; intestinal caeca very small and short, originating in xxii. Remarks. The numbers of spermathecal pores, clitellum segments, and male pores with genital markings agree with the description of P. lanyuensis Shen & Tsai, 2002. This species was first described as new from Lanyu, Taitung Co., Taiwan. Our collection from Basiandong, Taitung Co., extends the species distribution to the main island of Taiwan.Published as part of Wang, Yu-Hsi & Shih, Hsi-Te, 2010, Earthworm fauna of Eastern Taiwan, with descriptions of two new species (Oligochaeta: Megascolecidae), pp. 52-68 in Zootaxa 2341 on page 64, DOI: 10.5281/zenodo.19330
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