1,721,133 research outputs found
Multi-response optimization of ultrathin poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
No full textMulti-response optimization of ultrathin Poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique
No full textEffects of pre-amorphization implantation (PAI) in ultra shallow junctions formed by SPER in deep sub-micron devices
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Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications
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Protein patterning on polycrystalline silicon–germanium via standard UV lithography for bioMEMS applications
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