152 research outputs found
In-device high resolution and high throughput optical metrology for process development and monitoring
No full textIn-device high resolution and high throughput optical metrology for process development and monitoring
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Defect characterization of EUV Self-Aligned Litho-Etch Litho-Etch (SALELE) patterning scheme for advanced nodes
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Defect detection and classification on imec iN5 node BEoL test vehicle with multibeam scanning electron microscope
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