1,721,063 research outputs found
Hybrid fixed abrasive CMP for 65 nm STI integration, FinFet structures and other advanced applications
No full textEffect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench
No full textEffect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench
No full textInvestigation of performance improvement and gate-to-junction leakage reduction fot the 90nm CMOS gate stack architecture
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