Search CORE

1,721,099 research outputs found

Study of EUV resist outgassing/contamination for device integration using EUVL processes

Author: Pollentier Ivan
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Update on EUV outgassing at imec

Author: Pollentier Ivan
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Imec update on resist outgassing qualification

Author: Pollentier Ivan
Lokasani Ragava
Gronheid Roel
Publication venue
Publication date: 01/01/2012
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Assessment of challenges in EUV resist outgassing and contamination characterization

Author: Pollentier Ivan
Lokasani Ragava
Gronheid Roel
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Electrical linewidth metrology for sub-65-nm applications

Author: Pollentier Ivan
Storms Greet
Cheng Shaunee
Publication venue
Publication date: 01/01/2004
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Progress in understanding EUV resist related outgassing and contamination

Author: Pollentier Ivan
Lokasani Ragava
Gronheid Roel
Publication venue
Publication date: 01/01/2012
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Assessment of resist outgassing related EUV optics contamination for CAR and non-CAR material chemistries

Author: Pollentier Ivan
Gronheid Roel
Neira Imanol
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Characterisation of EUV resist related outgassing and contamination

Author: Pollentier Ivan
Leeson Michael
Berger Margaux
Goethals Mieke
Gronheid Roel
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Influence of immersion lithography on wafer edge defectivity

Author: Burkeen F.
Pollentier Ivan
Somanchi A.
Vedula S.
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Outgassing studies on EUV underlayers containing PAGs

Author: Guerrero Douglas
Pollentier Ivan
Lokasani Ragava
Ouattara Tantiboro
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

…

core