1,720,994 research outputs found
Microwave irradiation as an alternative source for conventional annealing: a study of pure TiO2, NiTiO3, CdTiO3 thin films by a sol-gel process for electronic applications
Evaluation of structural and mechanical properties of aluminum oxide thin films deposited by a sol-gel process: Comparison of microwave to conventional anneal
Structural characterization of iron titanium oxide synthesized by sol-gel spin-coating technique
Growth of single phase tetragonal structure iron tantalum oxide thin films grown by sol-gel spin coating technique (vol 20, pg 969, 2001)
Synthesis and characterization of hafnium oxide and hafnium aluminate ultra-thin films by a sol-gel spin coating process for microelectronic applications
Currently there are intense industry-wide efforts in searching for new high dielectric constant (high-k) materials for use in future generations of ultra-large scale integrated circuits (ULSI). There are number of requirements for the new high-k materials, such as high dielectric constant, thermal stability (400 degrees C or higher), high mechanical strength, and good adhesion to neighboring layers. Oxide spinels comprise a very large group of structurally related compounds many of which are of considerable technological significance. Spinels exhibit a wide range of electronic and magnetic properties in particular nickel, hafnium, cobalt, containing spinels. In the present investigation, crack free, dense polycrystalline monoclinic structure of pure HfO2, and Al2HfO5 ultra-thin films have been prepared by a simple and cost effective sol-gel spin coating method. The formation of the monoclinic HfO2 phase at 600 degrees C and complete formation of the single phase Al2HfO5 at 800 degrees C has been reported. The composition of the annealed films has been measured and found to be 70 at.% of O, 30 at.% of Hf for HfO2 and 22 at.% of Al, 12 at.% of Hf and 66 at.% of O for Al2HfO5 films, which are close to the stoichiometry of the HfO2 and Al2HfO5 thin films. (c) 2007 Elsevier B.V. All rights reserved
Synthesis of nanocrystalline ZnTiO3 perovskite thin films by sol-gel process assisted by microwave irradiation
Nanocrystalline ZnTiO3 thin films have been grown on Si (100) at room temperature by using simple, cost effective sol-gel process assisted by microwave irradiation for thermal treatment. For comparison purpose the deposited films have subjected to two kinds of annealing treatments: first set by using conventional annealing and second set by irradiating the deposited films at different microwave powers for 10 min. In both treated films, formation of cubic phase ZnTiO3 structure has been observed. It is evident that there is a dramatic structural modification when the deposited films are exposed to microwave. It is evident that there is a dramatic change in the morphological properties of the films irradiated in microwave compared to the conventional annealing temperature. Microwave exposed films have shown 19% of Zn, 19% of Ti and 62% of O in the films close to the stiochiometry of the ZnTiO3, where as annealed films have shown 18% of Zn, 17.5% of Ti, and 64.5% of O in the films of ZnTiO3. Plausible mechanism for the formation of cubic phase of ZnTiO3 at low microwave powers has also been discussed. This new innovative microwave heating could open a door for the advanced technologies to cut down the process cost in post treatment of the materials. (c) 2006 Elsevier Ltd. All rights reserved
Structural, compositional, thermal resistant and hydro-oleophobic properties of fluorine based block-co-polymer films on quartz substrates by wet chemical process
Crack free and smooth surfaces of poly [4,5-difluoro 2,2-bis (trifluoromethyl)-(1,3 dioxole)-co-tetrafluoroethylene] (TFE-co-TFD) thin films have been deposited by wet chemical dip coating technique on polished quartz and glass slide substrates. The deposited films have been subjected to annealing at different temperatures ranging from 100 to 500 degrees C for 1 h in argon atmosphere. The elemental composition of the as-deposited (xerogel) thin film as well as film annealed at 400 degrees C was measured by X-ray photoelectron spectroscopy and observed that there was no change in the composition of the film. X-ray diffraction pattern revealed the amorphous behaviour of both as-deposited and film annealed at 400 degrees C. Surface morphology and elemental composition of the films have been examined by employing scanning electron microscopy attached with energy dispersive X-ray analyser, respectively. It was found that as the annealing temperature increased from 100 degrees to 400 degrees C, nano-hemisphere-like structures have been grown, which in turn has shown increase in the water contact angle from 122 degrees to 148 degrees and oil (peanut) contact angle from 85 degrees to 96 degrees. No change in the water contact angle (122) has been observed when the films deposited at room temperature were heated in air from 30 to 80 degrees C as well as exposed to steam for 8 days for 8 h/day indicating thermal stability of the film. (c) 2006 Elsevier Ltd. All rights reserved
Synthesis and characterisation of cadmium titanium oxide thin films by sol-gel technique
Crack free, dense and transparent CdTiO3 thin films have been prepared by sol-gel technique using titanium butoxide and cadmium acetate. The formation of the CdTiO3 phase started from 500degreesC annealing temperature onwards. The complete orthorhombic structure of CdTiO3 was formed on Silicon (100) substrate at an annealing temperature of 600degreesC for 5 h. As the annealing temperature increased from 600 to 700degreesC, we have observed the cadmium silicate phase at the interface of Si and CdTiO3 phase. Structural, morphological and elemental evolution of these CdTiO3 thin films produced by sol-gel synthesis were characterised by grazing incidence X-ray diffraction (GIXRD), tapping mode atomic force microscopy (TMAFM), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) respectively. (C) 2002 Elsevier Science Ltd. All rights reserved
Synthesis and characterization of cadmium titanium oxide powders by sol-gel technique
Uniform crystals of CdTiO3 orthorhombic phase have been preapred by Sol-Gel method using titanium butoxide and cadmium acetate. For the first time the sample has been characterised detailedly to confirm the formation of pure single phase of CdTiO3. It is observed that the sample sintered at 500 degrees C for 5 h showed complete formation of the single phase of CdTiO3 by X-ray diffraction technique. X-ray photoelectron spectroscopy measurement has been carried out for the bulk CdTiO3 sintered at 500 degrees C for 5 h, which showed 20% of Cd, 20% of Ti and 60% of O indicating stoichiometric CdTiO3. Surface morphology studies by scanning electron microscopy showed uniform crystals of CdTiO3. The purity of the compound has also been checked by Energy Dispersive X-ray method indicating the absence of foreign ions apart from that, the ratio of Cd : Ti has been calculated and found to be 1 : 1 indicating the stoichiometric CdTiO3. (C) 2000 Kluwer Academic Publishers
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