11 research outputs found
Innovative monolithic detector for tri-spectral (THz, IR, Vis) imaging
No full textFusion of multispectral images has been explored for many years for security and used in a number of commercial products. CEA-Leti and FBK have developed an innovative sensor technology that gathers monolithically on a unique focal plane arrays, pixels sensitive to radiation in three spectral ranges that are terahertz (THz), infrared (IR) and visible. This technology benefits of many assets for volume market: compactness, full CMOS compatibility on 200mm wafers, advanced functions of the CMOS read-out integrated circuit (ROIC), and operation at room temperature. The ROIC houses visible APS diodes while IR and THz detections are carried out by microbolometers collectively processed above the CMOS substrate. Standard IR bolometric microbridges (160x160 pixels) are surrounding antenna-coupled bolometers (32X32 pixels) built on a resonant cavity customized to THz sensing. This paper presents the different technological challenges achieved in this development and first electrical and sensitivity experimental tests
Compensation of nonlinear hardening effect in a nanoelectromechanical torsional resonator
No full textInternational audienceA mechanical resonator based on torsional resonance has been fabricated in our facilities to sense infrared radiation. Actuation and detection are both electrostatic. Reaching phonon noise is highly desirable in order to get low noise uncooled infrared detectors. Therefore a high dynamic range has to be reached to increase as much as possible the overall signal to noise ratio and minimize the contribution of amplitudes noises (thermomechanical or electrical) to frequency noise. The dimensions of resonator body are similar to most clamped-clamped NEMS and our devices are thus also greatly affected by nonlinearities. We present here a nonlinear model for mechanical behavior around fundamental mode resonance taking account of both mechanical and electrostatic nonlinearities. The model correctly reproduces the nonlinear behavior observed for different resonator designs. We experimentally observe on some devices a compensation of hardening effects, allowing a linear operation of torsion angle up to 13. The model provided in this work allows an engineering strategy in order to design high linear dynamic range for fundamental torsional mode
Influence of the synthesis process and structural characteristics of iron oxides on the 1/f noise
No full text\u3cp\u3eThis paper reports on the study of 1/f noise in iron oxide thin films as a function of sheet resistance (R\u3csub\u3esh\u3c/sub\u3e), for materials elaborated through two synthesis processes. It establishes the relationships between process, structural properties and 1/f noise behaviour with R\u3csub\u3esh\u3c/sub\u3e, following the approach described in [12] which is suitable for thin films materials.\u3c/p\u3
#x00B5;m pixel pitch TEC-less IR bolometer imager with below 50mK and below 4V power supply
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Technological customization of uncooled amorphous silicon microbolometer for THz real time imaging
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