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1,721,638 research outputs found

Progress and challenges of kesterite solar cells for thin film PV applications

Author: Meuris Marc
Brammertz Guy
Publication venue
Publication date: 01/01/2014
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Light point defect generation during photoresist spin coating

Author: Meuris Marc
Heyns Marc
Mouche Laurent
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Implementation of Ge and III/V transistors on Si substrates for future generation CMOS technologies

Author: Meuris Marc
Caymax Matty
Heyns Marc
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Silicon surface roughening in an iron contaminated SCl bath

Author: Meuris Marc
Heyns Marc
Knotter D. M.
Mouche Laurent
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Optimized insitu rinsing for HF last processes

Author: Meuris Marc
Cornelissen Ingrid
Kübelbeck A.
Wolke K.
Oshinowo J.
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Point of use HF purification for Si surface preparation

Author: Meuris Marc
Fyen Wim
Heyns Marc
Zahka J.
Mouche Laurent
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Point of use HF purification for silicon surface preparation by ion exchange

Author: Meuris Marc
Fyen Wim
Heyns Marc
Zahka J.
Mouche Laurent
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

New slurry formulation for copper-CMP process in a damascene integration scheme

Author: Meuris Marc
Terzieva Valentina
Sijmus Bram
Puppe Lothar
Passing Gerd
Publication venue
Publication date: 01/01/2002
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Photoresist filtration performance of UPE and PTFE filters

Author: Meuris Marc
Heyns Marc
Zahka J.
Mouche Laurent
Publication venue
Publication date: 31/12/9999
Field of study

imec Publications (Interuniversity Microelectronics Centre)

Ultra-thin gate oxide yield and reliability

Author: Meuris Marc
Heyns Marc
Mertens Paul
Depas Michel
Vermeire Bert
Publication venue
Publication date: 01/01/1994
Field of study

imec Publications (Interuniversity Microelectronics Centre)

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