1,721,039 research outputs found
Development of high-chi directed self-assembly process based on key learning from PS-b-PMMA system
No full textPost metal etch polymer removal: an investigation of the cleaning to remove residual of Si-C and Si-F after fluorocarbon plama etch on the silicon surface
No full textPost metal etch polymer removal: an investigation of the cleaning to remove residual of Si-C and Si-F after fluorocarbon plama etch on the silicon surface
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Development of a metal gate and silicon selective "dry ash only" process for combined extension and halo implanted photo resist
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ICP and ICPsm process development, a) dry strip only, b) low temperature SiC oxidation removal
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