1,721,118 research outputs found
Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterization
No full textFormation and wet removal of organic and titanium-containing residues on patterned TiN/porous low-k structure
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New cleaning solutions for all-wet-post etch residue removal on Cu BEOL for sub 45nm nodes
No full textCleaning and etching solutions for the prospective use of Molybdenum in next generation interconnect fabrication.
No full textApplication of surface and interface characterization of materials in back-end-of-line interconnect
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