1,721,004 research outputs found
Ultra-low k dielectric and plasma damage control for advanced technology nodes (10-nm and below)
No full textComparative analysis of the factors leading to low-k degradation during the integration process
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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach
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Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues
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