1,721,079 research outputs found
Study of the thermal elimination and degradation processes of PPV and OC1C10-PPV precursor polymers with in-situ analytical techniques
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Study of the thermal elimination and degradation processes of n-alkylsulfinyl-PPV and -OC1C10-PPV precursor polymers with in situ spectroscopic techniques
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Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterization
No full textFormation and wet removal of organic and titanium-containing residues on patterned TiN/porous low-k structure
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Aqueous photoresist and BARC wet strip in BEOL MHM patterning using UV and ozonated chemistry
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Modification of BARC layer by UV irradiation for post-etch wet strip applications in BEOL
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