583 research outputs found
An investigation of disilane-digermane precursors combination for low temperature SiGe epitaxy
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In-line characterisation of hetero bipolar transistor base layers and pMOS devices with embedded SiGe by high-resolution X-ray diffraction
No full textIn-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction
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In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction
No full textInfluence of extensions implantation on selective epitaxial growth of Si used for production of FINFET raised source/drains
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