1,721,035 research outputs found
Roughness characterization in the frequency domain and LWR mitigation with post-litho processes
No full textRoughness characterization in the frequency domain and linewidth roughness mitigation with post-lithography processes
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Continued Optimization of Point-Of-Use Filtration for Metal Oxide Photoresists to Reduce Defect Density
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High performance filtration for bulk materials: a novel HDPE membrane filter designed for EUV Lithography
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Optical absorption and characteristics of low-k films and barrier layers in the UV range
No full textImpact of post-litho linewidth roughness smoothing processes on the post-etch patterning result
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