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Micromechanical ring resonators with a 2D phononic crystal support for mechanical robustness and providing mask misalignment toelerance
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Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)
No full textDouble MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range
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