98 research outputs found
Multiphysics modelling and experimental validation of microelectromechanical resonator dynamics
Full text linkThe modelling of microelectromechanical systems provides a very challenging task in microsystems engineering. This field of research is inherently multiphysics of nature, since different physical phenomena are tightly intertwined at microscale. Typically, up to four different physical domains are usually considered in the analysis of microsystems: mechanical, electrical, thermal and fluidic. For each of these separate domains, well-established modelling and analysis techniques are available. However, one of the main challenges in the field of microsystems engineering is to connect models for the behavior of the device in each of these domains to equivalent lumped or reduced-order models without making unacceptably inaccurate assumptions and simplifications and to couple these domains correctly and efficiently. Such a so-called multiphysics modelling framework is very important for simulation of microdevices, since fast and accurate computational prototyping may greatly shorten the design cycle and thus the time-to-market of new products. This research will focus on a specific class of microsystems: microelectromechanical resonators. MEMS resonators provide a promising alternative for quartz crystals in time reference oscillators, due to their small size and on-chip integrability. However, because of their small size, they have to be driven into nonlinear regimes in order to store enough energy for obtaining an acceptable signal-to-noise ratio in the oscillator. Since these resonators are to be used as a frequency reference in the oscillator circuits, their steady-state (nonlinear) dynamic vibration behaviour is of special interest. A heuristic modelling approach is investigated for two different MEMS resonators, a clamped-clamped beam resonator and a dog-bone resonator. For the clamped-clamped beam resonator, the simulations with the proposed model shows a good agreement with experimental results, but the model is limited in its predictive capabilities. For the dogbone resonator, the proposed heuristic modelling approach does not lead to a match between simulations and experiments. Shortcomings of the heuristic modelling approach serve as a motivation for a first-principles based approach. The main objective of this research is to derive a multiphysics modelling framework for MEMS resonators that is based on first-principles formulations. The framework is intended for fast and accurate simulation of the steady-state nonlinear dynamic behaviour of MEMS resonators. Moreover, the proposed approach is validated by means of experiments. Although the multiphysics modelling framework is proposed for MEMS resonators, it is not restricted to this application field within microsystems engineering. Other fields, such as (resonant) sensors, switches and variable capacitors, allow for a similar modelling approach. In the proposed framework, themechanical, electrical and thermal domains are included. Since the resonators considered are operated in vacuum, the fluidic domain (squeeze film damping) is not included. Starting from a first-principles description, founded on partial differential equations (PDEs), characteristic nonlinear effects from each of the included domains are incorporated. Both flexural and bulk resonators can be considered. Next, Galerkin discretization of the coupled PDEs takes place, to construct reduced-order models while retaining the nonlinear effects. The multiphysics model consists of the combined reduced-order models from the different domains. Designated numerical tools are used to solve for the steady-state nonlinear dynamic behaviour of the combined model. The proposed semi-analytical (i.e. analytical-numerical) multiphysics modeling framework is illustrated for a full case study of an electrostatically actuated single-crystal silicon clamped-clamped beam MEMS resonator. By means of the modelling framework, multiphysics models of varying complexity have been derived for this resonator, including effects like electrostatic actuation, fringing fields, shear deformation, rotary inertia, thermoelastic damping and nonlinear material behaviour. The first-principles based approach allows for addressing the relevance of individual effects in a straightforward way, such that the models can be used as a (pre-)design tool for dynamic response analysis. The method can be considered complementary to conventional finite element simulations. The multiphysics model for the clamped-clamped beam resonator is validated by means of experiments. A good match between the simulations and experiments is obtained, thereby giving confidence in the proposed modelling framework. Finally, next to themodelling approach for MEMS resonators, a technique for using these nonlinear resonators in an oscillator circuit setting is presented. This approach, called phase feedback, allows for operation of the resonator in its nonlinear regime. The closedloop technique enables control of both the frequency of oscillation and the output power of the signal. Additionally, optimal operation points for oscillator circuits incorporating a nonlinear resonator can be defined
Huygens' synchronization of dynamical systems : beyond pendulum clocks
Full text linkSynchronization is one of the most deeply rooted and pervasive behaviours in nature. It extends from human beings to unconscious entities. Some familiar examples include the fascinating motion of schools of fish, the simultaneous flashing of fireflies, a couple dancing in synchrony with the rhythm of the music, the synchronous firing of neurons and pacemaker cells, and the synchronized motion of pendulum clocks. In a first glimpse to these examples, the existence of selfsynchronization in nature may seem almost miraculous. However, the main "secret" behind this phenomenon is that there exists a communication channel, called coupling, such that the entities/systems can influence each other. This coupling can be, for instance, in the form of a physical interconnection or a certain chemical process. Although synchronization is a ubiquitous phenomenon among coupled oscillatory systems, its onset is not always obvious. Consequently, the following questions arise: How exactly do coupled oscillators synchronize themselves, and under what conditions? In some cases, obtaining answers for these questions is extremely challenging. Consider for instance, the famous example of Christiaan Huygens of two pendulum clocks exhibiting anti-phase or in-phase synchronized motion. Huygens did observe that there is a "medium" responsible for the synchronized motion, namely the bar to which the pendula are attached. However, despite the remarkably correct observation of Huygens, even today a complete rigorous mathematical explanation of this phenomenon, using proper models for pendula and flexible coupling bar, is still missing. The purpose of this thesis is to further pursue the nature of the synchronized motion occurring in coupled oscillators. The first part, addresses the problem of natural synchronization of arbitrary self-sustained oscillators with Huygens coupling. This means that in the analysis, the original setup of Huygens’ clocks is slightly modified in the sense that each pendulum clock is replaced by an arbitrary second order nonlinear oscillator and instead of the flexible wooden bar (called here Huygens’ coupling), a rigid bar of one degree of freedom is considered. Each oscillator is provided with a control input in order to guarantee steady-state oscillations. This requirement of having a control input to sustain the oscillations can be linked to Huygens’ pendulum clocks, where each pendulum is equipped with an escapement mechanism, which provides an impulsive force to the pendulum in order to keep the clocks running. Then, it is shown that the synchronized motion in the oscillators is independent of the kind of controller used to maintain the oscillations. Rather, the coupling bar, i.e. Huygens’ coupling is considered as the key element in the occurrence of synchronization. In particular, it is shown that the mass of the coupling bar determines the eventual synchronized behaviour in the oscillators, namely in-phase and anti-phase synchronization. The Poincaré method is used in order to determine the existence and stability of these synchronous motions. This is feasible since in the system there exists a natural small parameter, namely the coupling strength, which value is determined by the mass of the coupling bar. Next, the synchronization problem is addressed from a control point of view. First, the synchronization problem of two chaotic oscillators with Huygens’ coupling is discussed. It is shown that by driving the coupling bar with an external periodic excitation, it is possible to trigger the onset of chaos in the oscillators. The mass of the coupling bar is considered as the bifurcation parameter. When the oscillators are in a chaotic state, the synchronization phenomenon will not occur naturally. Consequently, it is demonstrated that by using a master-slave configuration or a mutual synchronization scheme, it is possible to achieve (controlled) synchronization. Secondly, the effect of time delay in the synchronized motion of oscillators with Huygens’ coupling is investigated. In this case, the wooden bar, is replaced by a representative dynamical system. This dynamical system generates a suitable control input for the oscillators such that in closed loop the system resembles a pair of oscillators with Huygens’ coupling. Under this approach, the oscillators do not need to be at the same location and moreover, the dynamical system generating the control input should be implemented separately, using for instance a computer. Consequently, the possibility of having communication time-delays (either in the oscillators or in the applied control input) comes into play. Then, the onset of in-phase and anti-phase synchronization in the coupled/controlled oscillators is studied as a function of the coupling strength and the time delay. In addition to computer simulations, the (natural and controlled) synchronized motion of the oscillators is validated by means of experiments. These experiments are performed in an experimental platform consisting of an elastically supported (controllable) rigid bar (in Huygens’ example the wooden bar) and two (controllable) mass-spring-damper oscillators (the pendulum clocks in Huygens’ case). A key feature of this platform is that its dynamical behaviour can be adjusted. This is possible due to the fact that the oscillators and the coupling bar can be actuated independently, then by using feedback, specific desirable oscillators’ dynamics are enforced and likewise the behaviour of the coupling bar is modified. This feature is exploited in order to experimentally study synchronous behaviour in a wide variety of dynamical systems. Another question considered in this thesis is related to the modeling of the real Huygens experiment. The models used in the first part of this thesis and the ones reported in the literature are simplifications of the real model: the coupling bar has been considered as a rigid body of one degree of freedom. However, in the real Huygens experiment, the bar to which the clocks are attached is indeed an infinite dimensional system for which a rigorous study of the in-phase and antiphase synchronized motion of the two pendula is, as far as is known, still never addressed in the literature. The second part of the thesis focuses on this. A Finite Element Modelling technique is used in order to derive a model consisting of a (finite) set of ordinary differential equations. Numerical results illustrating all the possible stationary solutions of the "true" infinite dimensional Huygens problem are included. In summary, the results contained in the thesis in fact reveal that the synchronized motion observed by Huygens extends beyond pendulum clocks
Dynamic stability of thin-walled structures : a semi-analytical and experimental approach
Full text linkBuckling refers to a sudden large increase in the deformation of a structure due to a small increase of some external load. If this external load has a dynamic nature, (e.g. a harmonic load, shock load, a step load and/or a random load), such a sudden increase in deformations is denoted as dynamic buckling. Thinwalled structures are often met in engineering practice due to their favourable mass-to-stiffness ratio. Such structures are very susceptible to buckling and are often subjected to dynamic loading. However, fast (pre-) design tools for obtaining detailed insight in the dynamic response and the stability of thinwalled structures subjected to dynamic loading are still lacking. One of the research objectives of this thesis is, therefore, to develop (fast) modelling and analysis tools which give insight in the behaviour of dynamically loaded thinwalled structures. To illustrate and to test the abilities of the developed tools, a number of case studies are examined. The tools are developed for structures with a relatively simple geometry. The geometric simplicity of the structures allows to derive models with a relative low number of degrees of freedom which are, therefore, very suitable for extensive parameter studies (as essential during the design process of thin-walled structures). These models are symbolically derived using a Ritz method in combination with assumptions regarding geometric nonlinear (strain-displacement) relations and the effects of (in-plane) inertia. The resulting models, obtained from energy expressions, are sets of coupled ordinary differential equations which include stiffness nonlinearities and (sometimes) inertia and damping nonlinearities. The modelling approach is implemented in a generic manner in a symbolic manipulation software package, so that model variations can be easily performed. Furthermore, a set of designated numerical tools is combined (e.g. continuation tools for equilibria, periodic solutions and bifurcations, and numerical integration routines) to solve the analytically derived models in a computationally efficient manner. Using this semi-analytical (i.e. analytical-numerical) approach four case studies are performed which include the dynamic buckling of an arch type of structure due to shock loading, snap-through behaviour of a transversally, harmonically excited pre-buckled beam, and the dynamic buckling of a beam and a cylindrical shell structure, both with top mass, which are harmonically loaded in axial direction at their base. For all cases, the effects of several parameter variations are illustrated, including the effect of small deviations from the nominal geometry (i.e. geometric imperfections). For validation, the semi-analytical results are compared with results obtained using the computationally much more demanding finite element modelling technique. However, more important, for two cases (i.e. the axially excited beam and cylindrical shell structures carrying a top mass), the semi-analytical results are also compared with experimentally obtained results. For this purpose, a dedicated experimental set-up has been realized. For the beam structure, the experimental results are in good agreement with the semianalytical results whereas for the cylindrical shell structure, a qualitative match is obtained. It has been illustrated that the differences between the experimental results and the semi-analytical results for the cylindrical shell may be due to the strong dependency of the results with respect to the geometrical imperfections present in the shell. Next to the specific new insights obtained for each case considered, the major result of the thesis is the illustrated power of the semi-analytical approach to obtain practical relevant insights in the phenomena of dynamic buckling of thin-walled structures. In conclusion it can be stated that the semi-analytical approach is a valuable tool in the (pre-) design process of thin-walled structures under dynamic loading
Modeling and control of thermomechanical systems: managing heat-induced deformation in extreme ultraviolet lithography
Full text linkReduced-order model updating for prediction of performance variables in mechanical structures
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Model updating for digital twins using Gaussian process inverse mapping models
Full text linkIn engineering dynamics, model updating is typically applied to minimize the mismatch between a physical system and its digital twin. This paper proposes to use inverse mapping models, based on Gaussian Processes (GPs). The latter are trained offline using simulated data, enabling fast online updating of physically interpretable parameter values in first-principles-based nonlinear dynamics models. The GPs infer parameter values based on time-domain features measured on the real system. Additionally, GPs enables uncertainty quantification of the inferred parameter values. A nonlinear multibody model is used to illustrate the capability of this method to update parameter values, with high computational efficiency, and extract corresponding uncertainty measures
Design and numerical analysis of an electrostatic energy harvester with impact for frequency up-conversion
Full text linkIntegration of vibration energy harvesters (VEHs) with small-scale electronic devices may form an attractive alternative for relatively large batteries and can, potentially, increase their lifespan. However, the inherent mismatch between a harvester’s high-frequency resonance, typically in the range 100 - 1000 Hz, relative to the available low-frequency ambient vibrations, typically in the range 10–100 Hz, means that low-frequency power generation in microscale VEHs remains a persistent challenge. In this work, we model a novel electret-based, electrostatic energy harvester (EEH) design. In this design, we combine an out-of-plane gap-closing comb (OPGC) configuration for the low-frequency oscillator with an in-plane overlap comb configuration for the high-frequency oscillator and employ impact for frequency up-conversion. An important design feature is the tunability of the resonance frequency through the electrostatic nonlinearity of the low-frequency oscillator. Impulsive normal forces due to impact are included in numerical simulation of the EEH through Moreau’s time-stepping scheme which has, to the best of our knowledge, not been used before in VEH design and analysis. The original scheme is extended with time-step adjustments around impact events to reduce computational time. Using frequency sweeps, we numerically investigate power generation under harmonic, ambient vibrations. Results show improved low-frequency power generation in this EEH compared to a reference EEH. The EEH design shows peak power generation improvement of up to a relative factor 3.2 at low frequencies due to the occurrence of superharmonic resonances
Passivity-Preserving, Balancing-Based Model Reduction for Interconnected Systems
Full text linkThis paper proposes a balancing-based model reduction approach for an interconnection of passive dynamic subsystems. This approach preserves the passivity and stability of both the subsystems and the interconnected system. Hereto, one Linear Matrix Inequality (LMI) per subsystem and a single Lyapunov equation for the entire interconnected system needs to be solved, the latter of which warrants the relevance of the reduction of the subsystems for the accurate reduction of the interconnected system, while preserving the modularity of the reduction approach. In a numerical example from structural dynamics, the presented approach displays superior accuracy with respect to an approach in which the individual subsystems are reduced independently.<br/
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