1,721,007 research outputs found
Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
No full textDevelopment of high-chi directed self-assembly process based on key learning from PS-b-PMMA system
No full textPhoto-responsive oligo(dimethylsiloxane) liquid crystals for defect-free nano-patterning at the sub-5 nm scale
No full textDual brush process for selective surface modification in graphoepitaxy directed self-assembly
No full textDual brush process for selective surface modification in graphoepitaxy directed self-assembly
No full textInfluence of block copolymer composition in grapho-epitaxy directed self-assembly for contact hole multiplication
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Viapatterning in the 7nm node using immersion lithography and graphoepitaxy directed self-assembly
No full textStudying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions
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