1,721,053 research outputs found
Noise in thin metal films during electromigration: a method to determine activation energy of grain boundary vacancies
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LOW-FREQUENCY NOISE MEASUREMENTS AS A COMPLEMENTARY TOOL IN THE INVESTIGATION OF INTEGRATED-CIRCUIT RELIABILITY
No full textThis paper describes the application of the low-frequency noise measurement technique to two of the main problems concerning the reliability of integrated circuits: the electromigration of metal interconnections and the electrical breakdown of thin silicon dioxide layers. The problems usually found in performing low-frequency noise measurements and the instrumentation required are described, together with the main results obtained. It is shown how, in electromigration experiments, the noise technique allows the evaluation of the activation energy at less severe test conditions than those characteristic of other techniques. In the case of oxide breakdown, the analysis of the low-frequency fluctuations of the current tunneling through the thin oxide layer shows that it is possible to interrupt the test just a few seconds before the breakdown occurs
Electromigration and low-frequency resistance fluctuations in aluminum thin film interconnections
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Micromachined Gas Flow Regulator for Ion Propulsion Systems
No full textA gas flow regulator for ion propulsion system on board
small satellites is proposed. The device is fabricated by means
of micromachining techniques and is made up of a silicon die
and a bomsilicate glass cover joined together by means of anodic
bonding. The fabrication process of two different versions or the
deviee is described. The gas mass flow dependenrr on both the
inlet pmnm and the absolute temperature is measumd and
diseussed
A STUDY ON THE PATTERN DEPENDENCE OF ELECTROCHEMICALLY ETCHED STRUCTURES ON N-TYPE SUBSTRATES
No full textExperimental determination of intervalley energy gaps as a temperature function for Ga(1-x)Al(x)As
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