18 research outputs found
Challenges for scanning electron microscopy and inspection on the nanometer scale for non-IC application: and how to tackle them using computational techniques
No full textIn this paper key challenges posed on metrology by feature dimensions of 20nm and below are discussed. In detail, the need for software-based tools for SEM image acquisition and image analysis in environments where CD-SEMs are not available and/or not flexible enough to cover all inspection tasks is outlined. These environments include research at universities as well as industrial R and D environments focused on non-IC applications. The benefits of combining automated image acquisition and analysis with computational techniques to simulate image generation in a conventional analytical SEM with respect to the overall reliability, precision and speed of inspection will be demonstrated using real-life inspection tasks as demonstrators.ImPhys/Charged Particle Optic
Silicon Nitride Waveguides and Spot Size Converters with < 1.76 dB Loss Over Broad Wavelength Range from 1010 nm to 1110 nm for OCT Applications
No full textCMOS plasmonic waveguides co-integrated with LPCVD-based Si3N4 via a butt-coupled interface
No full textIntegrated perovskite lasers on a silicon nitride waveguide platform by cost-effective high throughput fabrication
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Integrated perovskite lasers on a silicon nitride waveguide platform by cost-effective high throughput fabrication
No full textAbstract: Metal-halide perovskites are a class of solution processed materials with
remarkable optoelectronic properties such as high photoluminescence quantum yields and
long carrier lifetimes, which makes them promising for a wide range of efficient photonic
devices. In this work, we demonstrate the first successful integration of a perovskite laser
onto a silicon nitride photonic chip. High throughput, low cost optical lithography is used,
followed by indirect structuring of the perovskite waveguide. We embed methylammonium
lead tri-iodide (MAPbI3) in a pre-patterned race-track microresonator and couple the emitted
light to an integrated photonic waveguide. We clearly observe the build-up of spectrally
narrow lasing modes at room temperature upon a pump threshold fluence of 19.6 μJcm−2. Our
results evidence the possibility of on-chip lasers based on metal-halide perovskites with
industry relevance on a commercially available dielectric photonic platform, which is a step
forward towards low-cost integrated photonic devices.Direct link to the publisher:
https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-25-12-13199&id=367240#articleBody
COPYRIGHT NOTICE.
©2017 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited
Co-integrating plasmonics with Si3N4 photonics towards a generic CMOS compatible PIC platform for high-sensitivity multi-channel biosensors: the H2020 PlasmoFab approach (Conference Presentation) (Withdrawal Notice)
No full textEfficient coupling between Si3N4 photonic and hybrid slot-based CMOS plasmonic waveguide
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