1,721,076 research outputs found

    Plasmon-enhanced Ge-based metal-semiconductor-metal photodetector at near-IR wavelengths

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    We demonstrate the use of plasmonic effects to boost the near-infrared sensitivity of metal-semiconductor-metal detectors. Plasmon-enhanced photodetection is achieved by properly optimizing Au interdigitated electrodes, micro-fabricated on Ge, a semiconductor that features a strong near IR absorption. Finite-difference time-domain simulations, photocurrent experiments and Fourier-transform IR spectroscopy are performed to validate how a relatively simple tuning of the contact geometry allows for an enhancement of the response of the device adapting it to the specific detection needs. A 2-fold gain factor in the Ge absorption characteristics is experimentally demonstrated at 1.4 µm, highlighting the potential of this approach for optoelectronic and sensing applications.QCD/Scappucci La

    Top–down SiGe nanostructures on Ge membranes realized by e-beam lithography and wet etching

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    SiGe nanostructures on Ge membranes have been fabricated by electron beam lithography and anisotropic wet chemical etching, starting from SiGe/Ge heterostructures epitaxially deposited on Si substrates. Two different top-down approaches have been studied in order to obtain the best freestanding structures. We find that the process in which the Ge membrane is suspended after the lithography of the SiGe nanostructures leads to high quality SiGe nanostructures without damage to either the SiGe nanostructures or the Ge membrane. The structures have been systematically analyzed at every step of the fabrication process, by scanning electron microscopy and by atomic force microscopy

    High quality SiGe electronic material grown by low energy plasma enhanced chemical vapour deposition

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    Low energy plasma enhanced chemical vapour deposition (LEPECVD) is a relatively new growth method, which has been used to create high quality epitaxial silicon germanium material on conventional Si(001) wafers. This material is eminently suitable for electronic devices. The best performance for n-type and p-type conduction is seen in tensile-strained Si and compressively strained Ge quantum wells, respectively. Since such quantum wells cannot be grown directly on a silicon substrate, a virtual substrate (VS) is first grown. The reactive conditions within the plasma make it possible to grow the VS at rates of up to 10 nms−1 independent of substrate temperature. The quantum wells were grown using a lower plasma intensity, at growth rates of approximately 0.3 nms−1. The electrical properties of the material compare very well with molecular beam epitaxy (MBE) references, and hybrid material where the buffer is grown by LEPECVD and the electrically active layers are grown by MBE. In addition, the structural quality of the material is analysed by atomic force microscopy, transmission electron microscopy and defect etching
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