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242 research outputs found

Investigation of a CF4/Ar RF gas discharge

Author: Meijer P.M.
Vallinga P.M.
Hoog de, F.J.
Smits A.J.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

Investigation of a CF4/Ar RF gas discharge

Author: Meijer P.M.
Vallinga P.M.
Hoog de, F.J.
Smits A.J.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

Investigation of a CF4/Ar RF gas discharge

Author: Meijer P.M.
Vallinga P.M.
Hoog de, F.J.
Smits A.J.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

In situ ellipsometry : an accurate analysis of films during plasma deposition and plasma etching

Author: Zeeuw CJH de
Timmermans CJ
Timmermans C.J.
Schram DC Daan
Schram D.C.
Hoog FJ Frits de
de Zeeuw C.J.H.
Hoog de, F.J.
Kroesen GMW Gerrit
Kroesen G.M.W.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

Electron densities in an RF etch plasma

Author: Bisschops T.H.J.
Flipsen R.F.
Schram D.C.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

In situ ellipsometry : an accurate analysis of films during plasma deposition and plasma etching

Author: Timmermans C.J.
Schram D.C.
de Zeeuw C.J.H.
Hoog de, F.J.
Kroesen G.M.W.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

Measurements of density and temperature profiles in an argon inductively coupled plasma

Author: Mullen van der, J.J.A.M.
van Lammeren A.C.A.P.
Schram D.C.
Sijde van der, B.
Nowak S.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

Measurements of density and temperature profiles in an argon inductively coupled plasma

Author: Sijde B Bart van der
Mullen van der, J.J.A.M.
van Lammeren A.C.A.P.
Schram DC Daan
Schram D.C.
Sijde van der, B.
Nowak S
Mullen JJAM Joost van der
Lammeren ACAP Andre van
Nowak S.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

Electron densities in an RF etch plasma

Author: Bisschops THJ
Bisschops T.H.J.
Flipsen R.F.
Flipsen RF
Schram DC Daan
Schram D.C.
Publication venue
Publication date: 01/01/1987
Field of study

Pure OAI Repository

A. Kinbara and I. Kondo

Author
Publication venue
Publication date: 2014
Field of study

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